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浏览/检索结果: 共10条，第1-10条 帮助 限定条件 专题：清华大学    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Fabrication of extreme-ultraviolet blazed gratings by use of direct argon-oxygen ion-beam etching through a rectangular photoresist mask 期刊论文 2010, 2010 Lin, Hui; Li, Lifeng 收藏  |  浏览/下载：2/0 提高离子束刻蚀亚微米光栅侧壁陡直度的方法 期刊论文 2010, 2010 孟祥峰; 李立峰; Meng Xiangfeng; Li Lifeng 收藏  |  浏览/下载：1/0 High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region 期刊论文 2010, 2010 Lin, Hui; Zhang, Lichao; Li, Lifeng; Jin, Chunshui; Zhou, Hongjun; Huo, Tonglin 收藏  |  浏览/下载：3/0 A method to fabricate convex holographic gratings as master gratings for making flat-fied concave gratings - art. no. 68320W 会议论文 HOLOGRAPHY AND DIFFRACTIVE OPTICS III, Conference on Holography and Diffractive Optics III, Beijing, PEOPLES R CHINA, Web of Science Zhou, Qian; Li, Lifeng; Zeng, Lijiang 收藏  |  浏览/下载：3/0 In-situ monitoring during ion-beam etching of multilayer dielectric gratings: simulation and experiment 会议论文 Holography, Diffractive Optics, and Applications II, Pts 1 and 2, Conference on Holography, Diffractive Optics and Applications II, Beijing, PEOPLES R CHINA, Web of Science, INSPEC Lin, H; Li, LF; Zeng, LJ 收藏  |  浏览/下载：4/0 A method to fabricate convex holographic gratings as master gratings for making flat-field concave gratings 会议论文 Proceedings of the SPIE - The International Society for Optical Engineering, Holography and Diffractive Optics III, Beijing, China, INSPEC Qian Zhou; Lifeng Li; Lijiang Zeng 收藏  |  浏览/下载：5/0 Method for controlling groove depth and duty cycle of rectangular photoresist gratings 期刊论文 2010, 2010 Zhao Jinsong; Li Lifeng; Wu Zhenhua 收藏  |  浏览/下载：3/0 In situ endpoint detection of reactive ion-beam etching of dielectric gratings with an etch-stop layer using downstream mass spectrometry 期刊论文 2010, 2010 Meng, Xiangfeng; Li, Lifeng 收藏  |  浏览/下载：2/0 Deep InP gratings for opto-electronic devices etched by Cl/sub 2 //CH/sub 4//Ar inductively coupled plasma 期刊论文 2010, 2010 Wang Jian; Tian Jian-Bai; Xiong Bing; Sun Chang-Zheng; Hao Zhi-Biao; Luo Yi 收藏  |  浏览/下载：3/0 Deep InP gratings for opto-electronic devices etched by Cl-2/CH4/Ar inductively coupled plasma 期刊论文 2010, 2010 Wang, Jian; Tian, Jian-Bai; Xiong, B.; Sun, C. Z.; Hao, Z. B.; Luo, Y. 收藏  |  浏览/下载：2/0