| High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region | |
| Lin, Hui ; Zhang, Lichao ; Li, Lifeng ; Jin, Chunshui ; Zhou, Hongjun ; Huo, Tonglin | |
| 2010-05-10 ; 2010-05-10 | |
| 关键词 | Optics |
| 中文摘要 | We describe a simple method to fabricate blazed gratings used in the extreme ultraviolet wavelength region. The method uses an argon and oxygen mixed-gas ion beam to directly etch the grating substrate through a rectangular profile photoresist grating mask. With this method the etched grating groove profile can be well controlled. An Mo/Si multilayer-coated specimen with a blaze angle of 1.9 degrees was fabricated and measured. At an incident angle of 10 degrees and a wavelength of 13.62 nm, the diffraction efficiency of the negative second order reaches 36.2%. (C) 2008 Optical Society of America. |
| 语种 | 英语 ; 英语 |
| 出版者 | OPTICAL SOC AMER ; WASHINGTON ; 2010 MASSACHUSETTS AVE NW, WASHINGTON, DC 20036 USA |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/25151]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | Lin, Hui,Zhang, Lichao,Li, Lifeng,et al. High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region[J],2010, 2010. |
| APA | Lin, Hui,Zhang, Lichao,Li, Lifeng,Jin, Chunshui,Zhou, Hongjun,&Huo, Tonglin.(2010).High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region.. |
| MLA | Lin, Hui,et al."High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region".(2010). |
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