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	A method to fabricate convex holographic gratings as master gratings for making flat-fied concave gratings - art. no. 68320W
	Zhou, Qian ; Li, Lifeng ; Zeng, Lijiang
	2010-05-10 ; 2010-05-10
会议名称	HOLOGRAPHY AND DIFFRACTIVE OPTICS III ; Conference on Holography and Diffractive Optics III ; Beijing, PEOPLES R CHINA ; Web of Science
关键词	grating design grating fabrication convex diffraction grating concave diffraction grating DIFFRACTION GRATINGS SPECTROMETERS Optics
中文摘要	Ion-beam etching blazed flat-field concave diffraction gratings (FFCG) to achieve high diffraction efficiency is a difficult task. This paper presents a new method to fabricate convex holographic gratings as master gratings for making FFCG. This method makes it convenient to fabricate blazed FFCG with corrected aberrations and uniform predetermined blaze angle over the grating surfaces. It can also be adapted to the commercial fabrication process. This method could be briefly described as follows: First, we make a convex grating using holographic recording method. The grooves are determined by the interference fringes of two spherical waves, one of which is divergent coming from the back side of the substrate, and the other is convergent coming from the front side. Leading-term aberrations can be corrected by optimizing the center positions of the two sphere waves. Second, the exposed convex grating is etched by ion beam to make a blazed convex grating. In this step, it is much easier to get a uniform blaze angle over the surface of a convex grating than over the surface of a concave grating. At last, the etched convex grating is used directly as a master grating to replicate blazed FFCG. An optimized example for a specific system structure is given in this paper. The advantages and difficulties of the method are discussed.
会议录出版者	SPIE-INT SOC OPTICAL ENGINEERING ; BELLINGHAM ; 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/19142]
专题	清华大学
推荐引用方式 GB/T 7714	Zhou, Qian,Li, Lifeng,Zeng, Lijiang. A method to fabricate convex holographic gratings as master gratings for making flat-fied concave gratings - art. no. 68320W[C]. 见:HOLOGRAPHY AND DIFFRACTIVE OPTICS III, Conference on Holography and Diffractive Optics III, Beijing, PEOPLES R CHINA, Web of Science.

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