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CORC

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Insights into the atomistic behavior in diamond chemical mechanical polishing with center dot OH environment using ReaxFF molecular dynamics simulation 期刊论文
COMPUTATIONAL MATERIALS SCIENCE, 2019, 卷号: 166, 页码: 136-142
作者:  Shi, Zhuoying;  Jin, Zhuji;  Guo, Xiaoguang;  Yuan, Song;  Guo, Jiang
收藏  |  浏览/下载：5/0  |  提交时间：2019/12/02
Precision Fabrication of Thin Copper Substrate by Double-sided Lapping and Chemical Mechanical Polishing 期刊论文
JOURNAL OF MANUFACTURING PROCESSES, 2019, 卷号: 44, 页码: 47-54
作者:  Pan, Bo;  Kang, Renke;  Guo, Jiang;  Fu, Haiyang;  Du, Dongxing
收藏  |  浏览/下载：44/0  |  提交时间：2019/12/02
Photochemically combined mechanical polishing of N-type gallium nitride wafer in high efficiency 期刊论文
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2019, 卷号: 55, 页码: 14-21
作者:  Ou, Li -Wei;  Wang, Ya-Hui;  Hu, Hui-Qing;  Zhang, Liang-Liang;  Dong, Zhi-Gang
收藏  |  浏览/下载：10/0  |  提交时间：2019/12/02
A novel chemical mechanical polishing slurry for yttrium aluminum garnet crystal 期刊论文
APPLIED SURFACE SCIENCE, 2019, 卷号: 496
作者:  Zhang, Zili;  Jin, Zhuji;  Guo, Jiang;  Han, Xiaolong;  Mu, Qing
收藏  |  浏览/下载：11/0  |  提交时间：2019/12/02
Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field 期刊论文
COMPUTATIONAL MATERIALS SCIENCE, 2018, 卷号: 155, 页码: 476-482
作者:  Guo, Xiaoguang;  Wang, Xiaoli;  Jin, Zhuji;  Kang, Renke
收藏  |  浏览/下载：5/0  |  提交时间：2019/12/02
Chemical-mechanical wear of monocrystalline silicon by a single pad asperity 期刊论文
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2017, 卷号: 120, 页码: 61-71
作者:  Wang, Lin;  Zhou, Ping;  Yan, Ying;  Zhang, Bi;  Kang, Renke
收藏  |  浏览/下载：7/0  |  提交时间：2019/12/02
A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad 期刊论文
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2015, 卷号: 77, 页码: 107-116
作者:  Zhou, Ping;  Dong, Zhigang;  Kang, Renke;  Jin, Zhuji;  Guo, Dongming
收藏  |  浏览/下载：5/0  |  提交时间：2019/12/09
AN IMPROVED RULE-BASED DUMMY METAL FILL METHOD FOR 65 NM ASIC DESIGN 期刊论文
JOURNAL OF CIRCUITS SYSTEMS AND COMPUTERS, 2013, 卷号: 22
作者:  Chen, Xiaoming;  Xin, Ling;  Zhang, Jianwei;  Li, Songsong
收藏  |  浏览/下载：1/0  |  提交时间：2019/12/11
Chemical Mechanical Polishing Slurries for Chemically Vapor-Deposited Diamond Films 期刊论文
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2013, 卷号: 135, 页码: -
作者:  Yuan, Zewei;  Jin, Zhuji;  Zhang, Youjun;  Wen, Quan
收藏  |  浏览/下载：11/0  |  提交时间：2019/12/11
A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing 期刊论文
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2013, 卷号: 69, 页码: 1009-1016
作者:  Zhou, Ping;  Guo, Dongming;  Kang, Renke;  Jin, Zhuji
收藏  |  浏览/下载：1/0  |  提交时间：2019/12/11

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