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	A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing
	Zhou, Ping; Guo, Dongming; Kang, Renke; Jin, Zhuji
刊名	INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
	2013
卷号	69页码:1009-1016
关键词	Chemical mechanical polishing Elastohydrodynamic lubrication Layered elastic theory Wafer Material removal rate
ISSN号	0268-3768
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4541757
专题	大连理工大学
作者单位	Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Zhou, Ping,Guo, Dongming,Kang, Renke,et al. A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing[J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,2013,69:1009-1016.
APA	Zhou, Ping,Guo, Dongming,Kang, Renke,&Jin, Zhuji.(2013).A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing.INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,69,1009-1016.
MLA	Zhou, Ping,et al."A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing".INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 69(2013):1009-1016.

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