A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing | |
Zhou, Ping; Guo, Dongming; Kang, Renke; Jin, Zhuji | |
刊名 | INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
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2013 | |
卷号 | 69页码:1009-1016 |
关键词 | Chemical mechanical polishing Elastohydrodynamic lubrication Layered elastic theory Wafer Material removal rate |
ISSN号 | 0268-3768 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4541757 |
专题 | 大连理工大学 |
作者单位 | Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Peoples R China. |
推荐引用方式 GB/T 7714 | Zhou, Ping,Guo, Dongming,Kang, Renke,et al. A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing[J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,2013,69:1009-1016. |
APA | Zhou, Ping,Guo, Dongming,Kang, Renke,&Jin, Zhuji.(2013).A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing.INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,69,1009-1016. |
MLA | Zhou, Ping,et al."A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing".INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 69(2013):1009-1016. |
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