| A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad | |
| Zhou, Ping; Dong, Zhigang; Kang, Renke; Jin, Zhuji; Guo, Dongming | |
| 刊名 | INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
 |
| 2015 | |
| 卷号 | 77页码:107-116 |
| 关键词 | Chemical mechanical polishing Elastohydrodynamic lubrication Multi-layered elastic theory Wafer Material removal rate |
| ISSN号 | 0268-3768 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4406012 |
| 专题 | 大连理工大学 |
| 作者单位 | Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Zhou, Ping,Dong, Zhigang,Kang, Renke,et al. A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad[J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,2015,77:107-116. |
| APA | Zhou, Ping,Dong, Zhigang,Kang, Renke,Jin, Zhuji,&Guo, Dongming.(2015).A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad.INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,77,107-116. |
| MLA | Zhou, Ping,et al."A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad".INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 77(2015):107-116. |
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