Insights into the atomistic behavior in diamond chemical mechanical polishing with center dot OH environment using ReaxFF molecular dynamics simulation | |
Shi, Zhuoying; Jin, Zhuji; Guo, Xiaoguang; Yuan, Song; Guo, Jiang | |
刊名 | COMPUTATIONAL MATERIALS SCIENCE |
2019 | |
卷号 | 166页码:136-142 |
关键词 | Diamond Chemical mechanical polishing Removal mechanism Molecular dynamics simulation ReaxFF |
ISSN号 | 0927-0256 |
URL标识 | 查看原文 |
WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/3219029 |
专题 | 大连理工大学 |
作者单位 | Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China. |
推荐引用方式 GB/T 7714 | Shi, Zhuoying,Jin, Zhuji,Guo, Xiaoguang,et al. Insights into the atomistic behavior in diamond chemical mechanical polishing with center dot OH environment using ReaxFF molecular dynamics simulation[J]. COMPUTATIONAL MATERIALS SCIENCE,2019,166:136-142. |
APA | Shi, Zhuoying,Jin, Zhuji,Guo, Xiaoguang,Yuan, Song,&Guo, Jiang.(2019).Insights into the atomistic behavior in diamond chemical mechanical polishing with center dot OH environment using ReaxFF molecular dynamics simulation.COMPUTATIONAL MATERIALS SCIENCE,166,136-142. |
MLA | Shi, Zhuoying,et al."Insights into the atomistic behavior in diamond chemical mechanical polishing with center dot OH environment using ReaxFF molecular dynamics simulation".COMPUTATIONAL MATERIALS SCIENCE 166(2019):136-142. |
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