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| Two - axis micro fluxgate sensor 期刊论文
2010, 2010
Kang Chun-lei; Yang Jian-zhong; Tian Yang-chao; Liu Gang
  收藏 | 浏览/下载：4/0 |
| Fabrication of (K,Na)NbO/sub 3/ lead-free piezoceramic microrod arrays by sol-gel processing with micromachined silicon templates 期刊论文
2010, 2010
Ying Xu; Dawei Liu; Fengping Lai; Yuhua Zhen; Jing-Feng Li
收藏 | 浏览/下载：4/0 |
| Micromachined rotational gyroscopes with an electrostatically levitated rotor 期刊论文
2010, 2010
Han Feng-tian; Wu Qiu-ping; Wu Li-ming; Dong Jimg-xin
收藏 | 浏览/下载：5/0 |
| Estimating error in measuring thermal conductivity using a T-type nanosensor 期刊论文
2010, 2010
Ito, Y.; Takahashi, K.; Fujii, M.; Xing Zhang
收藏 | 浏览/下载：7/0 |
| Effects of geometry of piezoelectric actuator on coupling characteristics of micro nebulizer 期刊论文
2010, 2010
Yang Mingwei; Zhou Zhaoying
收藏 | 浏览/下载：2/0 |
| Error analysis of capacitance detector diodes in micro machined accelerometers 期刊论文
2010, 2010
Hu Hao; Dong Jingxin; Wan Caixin; Liu Yunfeng
收藏 | 浏览/下载：5/0 |
| Contrastive study on the mechanical performance of MEMS microsprings fabricated by LIGA and UV-LIGA technology 会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, MEMS/MOEMS Technologies and Applications III, Beijing, China, INSPEC
Hua Li; Gengchen Shi
收藏 | 浏览/下载：2/0 |
| Feedback control strategy suppressing structural error in MEMS gyroscope 期刊论文
2010, 2010
Yang Jun; Gao Zhong-yu; Zhang Rong; Chen Zhi-yong
收藏 | 浏览/下载：4/0 |
| A micro-electromechanical system design and manufacture considering fabrication error 会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, MEMS/MOEMS Technologies and Applications III, Beijing, China, INSPEC
Hua Li; Gengchen Shi
收藏 | 浏览/下载：2/0 |
| Analysis on shock resistance of micromachined angular rate sensor based on convection heat transfer 期刊论文
2010, 2010
Zhao Ying; Zhu Rong; Ye Xiong-ying; Yang Yong-jun
收藏 | 浏览/下载：3/0 |
