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	Feedback control strategy suppressing structural error in MEMS gyroscope
	Yang Jun ; Gao Zhong-yu ; Zhang Rong ; Chen Zhi-yong
	2010-05-10 ; 2010-05-10
关键词	Practical Theoretical or Mathematical/ digital control feedback gyroscopes micromechanical devices/ feedback control structural error MEMS gyroscope structural imperfection restrictive tolerance microfabrication environment-dependent structure parameters digital control architecture feedback decoupling control constant-frequency control constant-amplitude control force-rebalance decoupling control/ B2575F Fabrication of MEMS and NEMS devices
中文摘要	This paper is mainly concerned with the structural imperfections due to restrictive tolerance in micro- fabrication, and the instrumental error resulted from environment-dependent structure parameters. A digital control architecture used to suppress the structural error of gyroscope was presented, including the feedback de-coupling control of structure, the constant-frequency and constant-amplitude control of drive mode, and the force-rebalance de-coupling control of sense model. Modeling and simulation on the above control loops were presented based on average and perturbation theory. The simulation results show that the control architecture can effectively reduce the cross-coupling errors and dependence of gyro output on structure parameters.
语种	中文 ; 中文
出版者	Editorial Department of Journal of Chinese Inertial Technology ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/24525]
专题	清华大学
推荐引用方式 GB/T 7714	Yang Jun,Gao Zhong-yu,Zhang Rong,et al. Feedback control strategy suppressing structural error in MEMS gyroscope[J],2010, 2010.
APA	Yang Jun,Gao Zhong-yu,Zhang Rong,&Chen Zhi-yong.(2010).Feedback control strategy suppressing structural error in MEMS gyroscope..
MLA	Yang Jun,et al."Feedback control strategy suppressing structural error in MEMS gyroscope".(2010).

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