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	Error analysis of capacitance detector diodes in micro machined accelerometers
	Hu Hao ; Dong Jingxin ; Wan Caixin ; Liu Yunfeng
	2010-10-12 ; 2010-10-12
关键词	Practical/ accelerometers capacitive sensors closed loop systems error analysis micromachining microsensors/ system error analysis capacitance detector diodes micromachined accelerometer square wave actuated detector diode closed-loop system/ A0710C Micromechanical and nanomechanical devices and systems A0670D Sensing and detecting devices A0630G Velocity, acceleration and rotation measurement B7230M Microsensors and nanosensors B2575F Fabrication of MEMS and NEMS devices B7320E Velocity, acceleration and rotation measurement
中文摘要	Square wave actuated detector diodes play important roles in micro machined accelerometer systems. A model for this kind of differential capacitance detection circuit was used to analyze the system errors and the effect of the system parameters on the closed-loop system. The results show that the nonlinearities in the detector diodes can be neglected when the system works as a close-loop system and that the output is mainly determined by the variations of the sensor capacity, not the detector diode circuit capacity. The results also show that the system stability is reduced with large-amplitude actuator waves.
语种	中文
出版者	Tsinghua University Press ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80141]
专题	清华大学
推荐引用方式 GB/T 7714	Hu Hao,Dong Jingxin,Wan Caixin,et al. Error analysis of capacitance detector diodes in micro machined accelerometers[J],2010, 2010.
APA	Hu Hao,Dong Jingxin,Wan Caixin,&Liu Yunfeng.(2010).Error analysis of capacitance detector diodes in micro machined accelerometers..
MLA	Hu Hao,et al."Error analysis of capacitance detector diodes in micro machined accelerometers".(2010).

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