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	Analysis on shock resistance of micromachined angular rate sensor based on convection heat transfer
	Zhao Ying ; Zhu Rong ; Ye Xiong-ying ; Yang Yong-jun
	2010-05-10 ; 2010-05-10
关键词	Practical Experimental/ angular measurement convection finite element analysis micromachining microsensors temperature sensors/ shock resistance analysis micromachined thermal gas angular rate sensor convection heat transfer static strain calculation transient strain calculation static stress calculation finite element software ANSYS heating wire support layer acceleration loading/ A0710C Micromechanical devices and systems A0260 Numerical approximation and analysis A0720D Thermometry B7230M Microsensors and nanosensors B7320R Thermal variables measurement B2575F Fabrication of MEMS and NEMS devices B7320C Spatial variables measurement B0290T Finite element analysis
中文摘要	Micromachined thermal gas angular rate sensor is kind of novel inertial device, which takes an advantage of high shock resistance due to use gas instead of conventionally used proof-mass as the key sensing element. The calculation of the static and transient strain and stress in supporting layer of heating wire and detection wires is performed, and the position with the largest stress is figured out by means of finite element software ANSYS. The results show that the largest stress point of support layer of heating wire is close to the clamped edges. The largest stress point of support layer of detection wire is close to the clamped edges and corners. When an acceleration loading is applied along z direction, the largest stress of support layer of heating wire is larger than that of support layer of detection wire. Experimental results show that our device can withstand the shock of 21200 g/sub n/, and the theoretic prediction of the shock resistance of the device can reach 200000 g/sub n/, all of which indicates the sensor has a good shock resistance.
语种	中文 ; 中文
出版者	Southeast University ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/24474]
专题	清华大学
推荐引用方式 GB/T 7714	Zhao Ying,Zhu Rong,Ye Xiong-ying,et al. Analysis on shock resistance of micromachined angular rate sensor based on convection heat transfer[J],2010, 2010.
APA	Zhao Ying,Zhu Rong,Ye Xiong-ying,&Yang Yong-jun.(2010).Analysis on shock resistance of micromachined angular rate sensor based on convection heat transfer..
MLA	Zhao Ying,et al."Analysis on shock resistance of micromachined angular rate sensor based on convection heat transfer".(2010).

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