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Dielectric microwave properties of Si-integrated pulsed laser deposited (Ba, Sr)TiO3 thin films up to 110 GHz 期刊论文
applied physics letters, 2015, 卷号: 107, 页码: 052905
Xi Ning; Shuming Chen; Jinying Zhang; Hui Huang; Lei Wang
收藏  |  浏览/下载：20/0  |  提交时间：2016/04/08
Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram 期刊论文
advanced materials research, 2013, 卷号: 677, 页码: 74-78
Han, Guowei; Si, Chaowei; Ning, Jing; Zhao, Yongmei; Sun, Guosheng; Yang, Fuhua
收藏  |  浏览/下载：11/0  |  提交时间：2014/05/08
Fabrication and characterization of an SOI MEMS gyroscope 期刊论文
journal of semiconductors, 2013, 卷号: 34, 期号: 6, 页码: 064004
Zhong Weiwei; Han Guowei; Si Chaowei; Ning Jin; Yang Fuhua
收藏  |  浏览/下载：78/0  |  提交时间：2014/05/16
Feed-through cancellation of a MEMS filter using the difference method and analysis of the induced notch 期刊论文
journal of semiconductors, 2013, 卷号: 34, 期号: 4, 页码: 045006
Han, Guowei; Si, Chaowei; Ning, Jin; Zhong, Weiwei; Sun, Guosheng; Zhao, Yongmei; Yang, Fuhua
收藏  |  浏览/下载：56/0  |  提交时间：2014/04/28
Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope 期刊论文
sensors, 2013, 卷号: 13, 期号: 8, 页码: 10550-10560
Chaowei Si, Guowei Han, Jin Ning and Fuhua Yang
收藏  |  浏览/下载：17/0  |  提交时间：2014/04/09
Fabrication and characterisation of polysilicon-based clamped-clamped filter 期刊论文
key engineering materials, 2011, 卷号: 483, 页码: 112-116
Zhao, Yongmei; Ning, Jin; Han, Guowei; Si, Chaowei
收藏  |  浏览/下载：20/0  |  提交时间：2012/06/14
Influence of nitrogen dose on the charge density of nitrogen-implanted buried oxide in SOI wafers 期刊论文
journal of semiconductors, 2010, 卷号: 31, 期号: 2, 页码: 99-102
Zheng Zhongshan; Liu Zhongli; Li Ning; Li Guohua; Zhang Enxia
收藏  |  浏览/下载：18/0  |  提交时间：2011/08/16
Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers 期刊论文
chinese physics b, 2010, 卷号: 19, 期号: 10, 页码: art. no. 106106
Tang HM (Tang Hai-Ma); Zheng ZS (Zheng Zhong-Shan); Zhang EX (Zhang En-Xia); Yu F (Yu Fang); Li N (Li Ning); Wang NJ (Wang Ning-Juan)
收藏  |  浏览/下载：50/0  |  提交时间：2010/11/02
Effect of implantation of nitrogen into SIMOX buried oxide on its fixed positive charge density 期刊论文
acta physica sinica, 2007, 卷号: 56, 期号: 9, 页码: 5446-5451
Zheng, ZS (Zheng Zhong-Shan); Zhang, EX (Zhang En-Xia); Liu, ZL (Liu Zhong-Li); Zhang, ZX (Zhang Zheng-Xuan); Li, N (Li Ning); Li, GH (Li Guo-Hua)
收藏  |  浏览/下载：36/0  |  提交时间：2010/03/29
SIMOX  
Sensitivity of Total-Dose Radiation Hardness of SIMOX Buried Oxides to Doses of Nitrogen Implantation into Buried Oxides 期刊论文
半导体学报, 2005, 卷号: 26, 期号: 5, 页码: 862-866
Zheng Zhongshan; Liu Zhongli; Zhang Guoqiang; Li Ning; Li Guohua; Ma Hongzhi; Zhang Enxia; Zhang Zhengxuan; Wang Xi
收藏  |  浏览/下载：17/0  |  提交时间：2010/11/23

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