Fabrication and characterisation of polysilicon-based clamped-clamped filter | |
Zhao, Yongmei ; Ning, Jin ; Han, Guowei ; Si, Chaowei | |
刊名 | key engineering materials |
2011 | |
卷号 | 483页码:112-116 |
关键词 | Electromechanical filters Fabrication Microelectromechanical devices Nanotechnology Polysilicon Resonators Technology |
ISSN号 | 10139826 |
通讯作者 | zhao, y.(ymzhao@semi.ac.cn) |
学科主题 | 微电子学 |
收录类别 | EI |
语种 | 英语 |
公开日期 | 2012-06-14 |
内容类型 | 期刊论文 |
源URL | [http://ir.semi.ac.cn/handle/172111/23067] |
专题 | 半导体研究所_半导体集成技术工程研究中心 |
推荐引用方式 GB/T 7714 | Zhao, Yongmei,Ning, Jin,Han, Guowei,et al. Fabrication and characterisation of polysilicon-based clamped-clamped filter[J]. key engineering materials,2011,483:112-116. |
APA | Zhao, Yongmei,Ning, Jin,Han, Guowei,&Si, Chaowei.(2011).Fabrication and characterisation of polysilicon-based clamped-clamped filter.key engineering materials,483,112-116. |
MLA | Zhao, Yongmei,et al."Fabrication and characterisation of polysilicon-based clamped-clamped filter".key engineering materials 483(2011):112-116. |
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