Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram

	Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram
	Han, Guowei ; Si, Chaowei ; Ning, Jing ; Zhao, Yongmei ; Sun, Guosheng ; Yang, Fuhua
刊名	advanced materials research
	2013
卷号	677 页码:74-78
学科主题	微电子学
收录类别	EI
语种	英语
公开日期	2014-05-08
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/24886]
专题	半导体研究所_半导体集成技术工程研究中心
推荐引用方式 GB/T 7714	Han, Guowei,Si, Chaowei,Ning, Jing,et al. Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram[J]. advanced materials research,2013,677:74-78.
APA	Han, Guowei,Si, Chaowei,Ning, Jing,Zhao, Yongmei,Sun, Guosheng,&Yang, Fuhua.(2013).Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram.advanced materials research,677,74-78.
MLA	Han, Guowei,et al."Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram".advanced materials research 677(2013):74-78.