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Applying the plasma physical sputtering process to SRF cavity treatment: Simulation and Experiment Study
期刊论文
APPLIED SURFACE SCIENCE, 2022, 卷号: 574, 页码: 10
作者:
Zhu, Tongtong
;
Luo, Didi
;
Wu, Andong
;
Tan, Teng
;
Guo, Hao
收藏
  |  
浏览/下载:79/0
  |  
提交时间:2022/01/12
SRF cavities
Plasma processing
Self-consistent model
Sputtering-yield probability distribution
IEDF
Highly Textured Assembly of Engineered Si Nanowires for Artificial Synapses Model
期刊论文
ACS APPLIED ELECTRONIC MATERIALS, 2021, 卷号: 3, 期号: 3, 页码: 1375-1383
作者:
Duan, Chunyang
;
Zhao, Dong
;
Wang, Xiang
;
Ren, Bei
;
Li, Mengqi
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2021/08/31
Si nanowires
HiGee technology
assembly
graphene quantum dots
artificial synapses
Scanning ion beam etching: A method for the fabrication of computer-generated hologram with nanometric accuracy for aspherical testing
期刊论文
Optics and Lasers in Engineering, 2021, 卷号: 139
作者:
R. Wang
;
Z. Zhang
;
Y. Bai
;
Y. Wang
;
X. Yin
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  |  
浏览/下载:3/0
  |  
提交时间:2022/06/13
Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes
期刊论文
Optics Express, 2020, 卷号: 28, 期号: 22, 页码: 33739-33746
作者:
Zhang, Jingwen
;
Li, Zhiwei
;
Shao, Junming
;
Liu, Dun
;
Fan, Bin
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2021/05/11
Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes
会议论文
作者:
Zhang, Jingwen
;
Li, Zhiwei
;
Shao, Junming
;
Liu, Dun
;
Fan, Bin
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2020/12/18
Electrodes
Electron temperature
EtchingElectron number densities
Etching depth
Etching uniformity
Irregular sample
Irregular shape
Large aperture
Plasma characteristics
Plasma discharge
Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes
期刊论文
Optics Express, 2020, 卷号: 28, 期号: 22, 页码: 33739-33746
作者:
Zhang, Jingwen
;
Li, Zhiwei
;
Shao, Junming
;
Liu, Dun
;
Fan, Bin
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2020/12/18
Electrodes
Electron temperature
EtchingElectron number densities
Etching depth
Etching uniformity
Irregular sample
Irregular shape
Large aperture
Plasma characteristics
Plasma discharge
Improvement of GaN plasma etching uniformity by optimizing the coil electrode with plasma simulation and experimental validation
期刊论文
SURFACE & COATINGS TECHNOLOGY, 2020, 卷号: 400
作者:
Xiao, Dezhi
;
Ruan, Qingdong
;
Liu, Liangliang
;
Shen, Jie
;
Cheng, Cheng
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  |  
浏览/下载:22/0
  |  
提交时间:2020/11/26
GaN
Plasma etching
Inductively-coupled plasma
Field coupling
Uniformity
Plasma simulation
Simulation of Discharge Characteristics for the Plasma Etching of Large Area SiO2 Substrates
期刊论文
JOURNAL OF RUSSIAN LASER RESEARCH, 2020, 卷号: 41, 期号: 3, 页码: 258-267
作者:
Zhang JW(张景文)
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  |  
浏览/下载:11/0
  |  
提交时间:2020/11/30
reactive ion etching
capacitive coupled discharge
fluid simulation
discharge parameter
large area SiO2 substrates
plasma radial uniformity
Simulation of Discharge Characteristics for the Plasma Etching of Large Area SiO2 Substrates
期刊论文
JOURNAL OF RUSSIAN LASER RESEARCH, 2020, 卷号: 41, 期号: 3, 页码: 258-267
作者:
Zhang, Jingwen
;
Fan, Bin
;
Li, Zhiwei
;
Gao, Guohan
;
Li, Bincheng
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2021/05/11
Reactive Ion Etching
Capacitive Coupled Discharge
Fluid Simulation
Discharge Parameter
Large Area Sio2 Substrates
Plasma Radial Uniformity
Fabrication of random microlens array for laser beam homogenization with high efficiency
期刊论文
Micromachines, 2020, 卷号: 11, 期号: 3
作者:
Xue, Li
;
Pang, Yingfei
;
Liu, Wenjing
;
Liu, Liwei
;
Pang, Hui
收藏
  |  
浏览/下载:21/0
  |  
提交时间:2021/05/11
chemical etching
random microlens array
beam homogenization
laser
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