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Optimization of pencil beam f-theta lens for high-accuracy metrology 期刊论文
OPTICAL ENGINEERING, 2018, 卷号: 57, 期号: 1, 页码: -
作者:  Peng, CQ;  He, YM;  Wang, J
收藏  |  浏览/下载:25/0  |  提交时间:2018/09/06
Laser flat-field system based on light scattering in nano-particle solution 期刊论文
OPTICS AND PRECISION ENGINEERING, 2015, 卷号: 23, 期号: 5, 页码: 1213-1220
作者:  Wang QS(王秋实);  Yang FG(杨福桂);  Liu DX(刘丁枭);  Sheng WF(盛伟繁);  Li M(李明)
收藏  |  浏览/下载:26/0  |  提交时间:2016/04/18
A novel long trace profiler for synchrotron radiation optics 期刊论文
2010, 2010
Li, Z; Zhao, Y; Li, DC; Xiao, TQ; Xia, SJ
收藏  |  浏览/下载:1/0
Design of co-path scanning long trace profiler for measurement of X-ray space optical elements (EI CONFERENCE) 会议论文
6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China
Shun L.; Yan G.; Wei Z.; Yang Z.
收藏  |  浏览/下载:19/0  |  提交时间:2013/03/25
In situ long trace profiler for measurement of Wolter type-I mirror (EI CONFERENCE) 会议论文
Advances in Metrology for X-Ray and EUV Optics III, August 1, 2010 - August 2, 2010, San Diego, CA, United states
Cui T. G.; Wang Y. G.; Ma W. S.; Chen B.
收藏  |  浏览/下载:20/0  |  提交时间:2013/03/25
The surface profile of Wolter type-I mirror has a great impact on the performance of Solar X-ray Telescope. According to the existing fabrication instrument and experimental conditions in our lab  an in situ Long Trace Profiler is developed and set up on the fabrication instrument in order to measure the surface profile of Wolter mirror in real time during fabrication process. Its working mechanism  structural parameters and data processing algorithm are investigated. The prototype calibrated by a standard plane mirror is used to measure a sample of Wolter type-I mirror. The results show that our prototype can achieve an accuracy of 2.6rad rms for slope error with a stability of 1.33rad during the whole measurement period. This can meet further fabrication requirements. 2010 Copyright SPIE - The International Society for Optical Engineering.  
Developing of in-suit long trance profiler for testing slope error of aspherical optical Elements (EI CONFERENCE) 会议论文
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
Zhou C.; Li H.; Chen C.; Zhou C.; Qian S.
收藏  |  浏览/下载:25/0  |  提交时间:2013/03/25
Profile error of super smooth surface of optical elements at X-ray/EUV in synchrotron radiation (SR) light beam line is described as slope error of them generally. The Long Trace Profiler (LPT) is used for testing surface slope error of SR optical elements in world generally. It is requisite to use In-suit LTP measuring surface thermal distortion of SR optical elements with high heat under high bright SR source. Authors design an In-suit LTP by means of co-path interferometer with pencil light beam. The instrument not only can be used for testing slope error of mirrors in Lab. also in situation test the distortion of mirror with high heat load at synchrotron light beam line. The device can be used to test various absolute surface figures of optical elements such as aspherieal  spherical and plane. It is needless standard reference surface. It is named by LTP-III. This paper describes its basic operating principle  optical system  mechanical constructions  DC serve motor control system  array detector  data acquisition system and computer system for controlling and data analysis of LTP-III. The Instrument has advantages of high accuracy  low cost  multifunction and wide application. Length of surface measured of optical element accuracy is 0.04 arcsec.  


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