Optimization of pencil beam f-theta lens for high-accuracy metrology

doi:10.1117/1.OE.57.1.015101

CORC > 上海应用物理研究所 > 中国科学院上海应用物理研究所 > 中科院上海应用物理研究所2011-2017年

	Optimization of pencil beam f-theta lens for high-accuracy metrology
	Peng, CQ ; He, YM ; Wang, J
刊名	OPTICAL ENGINEERING
	2018
卷号	57 期号:1 页码:-
关键词	Long Trace Profiler Surface Profiler Deflectometry Ellipse Mirrors Circle Range
ISSN号	0091-3286
DOI	10.1117/1.OE.57.1.015101
文献子类	期刊论文
英文摘要	Pencil beam deflectometric profilers are common instruments for high-accuracy surface slope metrology of x-ray mirrors in synchrotron facilities. An f-theta optical system is a key optical component of the deflectometric profilers and is used to perform the linear angle-to-position conversion. Traditional optimization procedures of the f-theta systems are not directly related to the angle-to-position conversion relation and are performed with stops of large size and a fixed working distance, which means they may not be suitable for the design of f-theta systems working with a small-sized pencil beam within a working distance range for ultra-high-accuracy metrology. If an f-theta system is not well-designed, aberrations of the f-theta system will introduce many systematic errors into the measurement. A least-squares' fitting procedure was used to optimize the configuration parameters of an f-theta system. Simulations using ZEMAX software showed that the optimized f-theta system significantly suppressed the angle-to-position conversion errors caused by aberrations. Any pencil-beam f-theta optical system can be optimized with the help of this optimization method. (c) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
语种	英语
WOS记录号	WOS:000424272600044
内容类型	期刊论文
源URL	[http://ir.sinap.ac.cn/handle/331007/29096]
专题	上海应用物理研究所_中科院上海应用物理研究所2011-2017年
作者单位	1.Peng, CQ 2.He, YM 3.Wang, J
推荐引用方式 GB/T 7714	Peng, CQ,He, YM,Wang, J. Optimization of pencil beam f-theta lens for high-accuracy metrology[J]. OPTICAL ENGINEERING,2018,57(1):-.
APA	Peng, CQ,He, YM,&Wang, J.(2018).Optimization of pencil beam f-theta lens for high-accuracy metrology.OPTICAL ENGINEERING,57(1),-.
MLA	Peng, CQ,et al."Optimization of pencil beam f-theta lens for high-accuracy metrology".OPTICAL ENGINEERING 57.1(2018):-.