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| Two - axis micro fluxgate sensor 期刊论文
2010, 2010
Kang Chun-lei; Yang Jian-zhong; Tian Yang-chao; Liu Gang
  收藏 | 浏览/下载：4/0 |
| Estimating error in measuring thermal conductivity using a T-type nanosensor 期刊论文
2010, 2010
Ito, Y.; Takahashi, K.; Fujii, M.; Xing Zhang
收藏 | 浏览/下载：7/0 |
| Error analysis of capacitance detector diodes in micro machined accelerometers 期刊论文
2010, 2010
Hu Hao; Dong Jingxin; Wan Caixin; Liu Yunfeng
收藏 | 浏览/下载：5/0 |
| Micro-assembly auto-focusing system based on image processing 期刊论文
2010, 2010
Duan Rui-ling; Duan Hui-bo; Li Qing-xiang; Li Yu-he; Yang Zai-hua
收藏 | 浏览/下载：5/0 |
| Contrastive study on the mechanical performance of MEMS microsprings fabricated by LIGA and UV-LIGA technology 会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, MEMS/MOEMS Technologies and Applications III, Beijing, China, INSPEC
Hua Li; Gengchen Shi
收藏 | 浏览/下载：2/0 |
| Feedback control strategy suppressing structural error in MEMS gyroscope 期刊论文
2010, 2010
Yang Jun; Gao Zhong-yu; Zhang Rong; Chen Zhi-yong
收藏 | 浏览/下载：4/0 |
| An out-chip method for measuring fatigue property of polysilicon thin film 期刊论文
2010, 2010
Wu Hao; Meng Yong-gang; Su Cai-jun; Guo Zhan-she; Wen Shi-zhu
收藏 | 浏览/下载：3/0 |
| A micro-electromechanical system design and manufacture considering fabrication error 会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, MEMS/MOEMS Technologies and Applications III, Beijing, China, INSPEC
Hua Li; Gengchen Shi
收藏 | 浏览/下载：2/0 |
| Femtosecond laser two-photon microfabrication control and monitoring system based on virtual instruments 会议论文
International Technology and Innovation Conference 2006. ITIC 2006, International Technology and Innovation Conference 2006. ITIC 2006, Hangzhou, China, INSPEC
Gao Guohua; Zhu Yu; Duan Guanghong; Zhang Ming
收藏 | 浏览/下载：6/0 |
| Assembling carbon nanotubes based on DEP and fluid driving 期刊论文
2010, 2010
Tan Miao-miao; Ye Xiong-ying; Wang Xiao-hao; Zhou Zhao-ying
收藏 | 浏览/下载：3/0 |
