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Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma 期刊论文
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2019, 卷号: 52
作者:  Jia, Wen-Zhu;  Zhang, Quan-Zhi;  Wang, Xi-Feng;  Song, Yuan-Hong;  Zhang, Ying-Ying
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/02
Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive-ion Etching 期刊论文
SENSORS AND MATERIALS, 2018, 卷号: 30, 页码: 2747-2760
作者:  Yan, Haixia;  Bao, Jinyan;  Yu, Quan;  Dong, Linxi
收藏  |  浏览/下载：13/0  |  提交时间：2019/11/26
Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing 期刊论文
MICROMACHINES, 2018, 卷号: 9
作者:  Yu, Mingxing;  Lv, Pin;  Xu, Tiantong;  Tan, Xiao;  Li, Haiwang
收藏  |  浏览/下载：6/0  |  提交时间：2019/12/30
Ion Energy and Angular Distribution in Biased Inductively Coupled Ar/O-2 Discharges by Using a Hybrid Model 期刊论文
PLASMA PROCESSES AND POLYMERS, 2017, 卷号: 14
作者:  Wen, De-Qi;  Zhang, Yu-Ru;  Lieberman, Michael A.;  Wang, You-Nian
收藏  |  浏览/下载：9/0  |  提交时间：2019/12/02
大高宽比纳米硅立柱的感应耦合等离子体刻蚀工艺优化 期刊论文
强激光与粒子束, 2017, 期号: 7, 页码: "77-81"
作者:  李欣;  刘建朋;  陈烁;  张思超;  邓彪
收藏  |  浏览/下载：39/0  |  提交时间：2018/08/17
Terahertz substrateless transmitarray antenna design and microfabrication 期刊论文
Microwave and Optical Technology Letters, 2016, 卷号: 58, 期号: 9, 页码: 2096-2100
作者:  Liu, Guang;  Wang, Hongjian;  Jiang, Jingshan;  Xue, Fei
收藏  |  浏览/下载：17/0  |  提交时间：2016/11/08
Fabrication and Characterization of Fine Pitch TSV Integration with Self-aligned Backside Insulation Layer Opening 其他
2016-01-01
Guan, Yong; Zeng, Qinghua; Chen, Jing; Ma, Shenglin; Jin, Yufeng
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Parametric Study of DRIE Process for Enhancing the Profile-preserving Property of Square Through Silicon Via 其他
2016-01-01
Guan, Yong; Zeng, Qinghua; Chen, Jing; Ma, Shenglin; Meng, Wei; Jin, Yufeng
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
基于MEMS平面弹簧的微小载荷测试方法 期刊论文
2015, 2015
吴健; 刘同冈; 刘帅; 商金玮
收藏  |  浏览/下载：3/0  |  提交时间：2017/06/15
Formation mechanism of multi-functional black silicon based on optimized deep reactive ion etching technique with SF6/C4F8 期刊论文
science china technological sciences, 2015
Zhu FuYun; Zhang XiaoSheng; Zhang HaiXia
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/10

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