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	Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive-ion Etching
	Yan, Haixia; Bao, Jinyan; Yu, Quan; Dong, Linxi
刊名	SENSORS AND MATERIALS
	2018
卷号	30页码:2747-2760
关键词	motional resistance electromechanical coupling electrostatic tuning MEMS disk resonator array DRIE process
ISSN号	0914-4935
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2912794
专题	西安交通大学
推荐引用方式 GB/T 7714	Yan, Haixia,Bao, Jinyan,Yu, Quan,et al. Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive-ion Etching[J]. SENSORS AND MATERIALS,2018,30:2747-2760.
APA	Yan, Haixia,Bao, Jinyan,Yu, Quan,&Dong, Linxi.(2018).Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive-ion Etching.SENSORS AND MATERIALS,30,2747-2760.
MLA	Yan, Haixia,et al."Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive-ion Etching".SENSORS AND MATERIALS 30(2018):2747-2760.

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