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Preparation of ellipsoidal rod-shaped silica nanocomposite abrasives by Chromium ion/PEG200 induced method for sapphire substrates chemical mechanical polishing 期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 卷号: 777, 页码: 1294-1303
作者:  Dong, Yue[1];  Lei, Hong[2];  Liu, Wenqing[3];  Chen, Yi[4]
收藏  |  浏览/下载:13/0  |  提交时间:2019/04/22
Highly efficient removal of sapphire by composite nanoabrasive with novel inorganic polyelectrolyte as a binder 期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 卷号: 782, 页码: 709-715
作者:  Wang, Tianxian[1];  Lei, Hong[2];  Dong, Yue[3];  Xu, Lei[4];  Dai, Sanwei[5]
收藏  |  浏览/下载:4/0  |  提交时间:2019/04/22
Preparation of -alumina/silica core-shell abrasives and their chemical mechanical polishing performances on sapphire substrates 期刊论文
MICRO & NANO LETTERS, 2018, 卷号: 13, 页码: 1315-1320
作者:  Wang, Xin[1];  Lei, Hong[2]
收藏  |  浏览/下载:5/0  |  提交时间:2019/04/22
Preparation of Ag2O modified silica abrasives and their chemical mechanical polishing performances on sapphire 期刊论文
FRICTION, 2017, 卷号: 5, 页码: 429-436
作者:  Zhang, Baichun[1];  Lei, Hong[2];  Chen, Yi[3]
收藏  |  浏览/下载:4/0  |  提交时间:2019/04/24
CMP behavior of alumina/metatitanic acid core-shell abrasives on sapphire substrates 期刊论文
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2017, 卷号: 50, 页码: 263-268
作者:  Wang, Xin[1];  Lei, Hong[2];  Chen, Ruling[3]
收藏  |  浏览/下载:3/0  |  提交时间:2019/04/24
Nd3+-doped colloidal SiO2 composite abrasives: Synthesis and the effects on chemical mechanical polishing (CMP) performances of sapphire wafers 期刊论文
APPLIED SURFACE SCIENCE, 2017, 卷号: 413, 页码: 16-26
作者:  Liu, Tingting[1];  Lei, Hong[2]
收藏  |  浏览/下载:9/0  |  提交时间:2019/04/24
Preparation of Mg-Doped Colloidal Silica Abrasives and Their Chemical Mechanical Polishing Performances on Sapphire 期刊论文
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2016, 卷号: 16, 页码: 9951-9957
作者:  Ma, Pan[1];  Lei, Hong[2];  Chen, Ruling[3]
收藏  |  浏览/下载:4/0  |  提交时间:2019/04/26
Preparation of cobalt-doped colloidal silica abrasives and their chemical mechanical polishing performances on sapphire 期刊论文
MICRO & NANO LETTERS, 2015, 卷号: 10, 页码: 657-661
作者:  Ma, Pan[1];  Lei, Hong[2];  Chen, Ruling[3]
收藏  |  浏览/下载:2/0  |  提交时间:2019/04/30
Preparation of porous alumina-g-polystyrene sulfonic acid abrasive and its chemical mechanical polishing behavior on hard disk substrate 期刊论文
MICROELECTRONIC ENGINEERING, 2014, 卷号: 116, 页码: 11-16
作者:  Huang, Liqin[1];  Wang, Zhijun[2];  Lei, Hong[3];  Chen, Ruling[4]
收藏  |  浏览/下载:12/0  |  提交时间:2019/04/30
Study of material removal processes of the crystal silicon substrate covered by an oxide film under a silica cluster impact: Molecular dynamics simulation 期刊论文
APPLIED SURFACE SCIENCE, 2014, 卷号: 305, 页码: 609-616
作者:  Chen, Ruling[1];  Wu, Yihua[2];  Lei, Hong[3];  Jiang, Ranran[4];  Liang, Min[5]
收藏  |  浏览/下载:12/0  |  提交时间:2019/04/30


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