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CORC

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MORPHOLOGY CONTROL OF MICROCHANNEL CROSS-SECTION USING SACRIFICIAL SPINNING FIBER 其他
2017-01-01
Zhang, Yangxi; Jing, Huize; Xu, Kaisi; Gao, Chencheng; Hao, Yilong; Meng, Fanrui; Gui, Yiming; Chen, Guoxing
收藏  |  浏览/下载：4/0  |  提交时间：2017/12/03
Field-assisted titanium-glass bonding 其他
2014-01-01
Li, Tianyu; Zhang, Yiming; Luo, Jin; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/17
Inductively coupled plasma etching of bulk tungsten for MEMS applications 其他
2014-01-01
Song, Lu; Li, Nannan; Zhang, Shibin; Luo, Jin; Hu, Jia; Zhang, Yiming; Chen, Shuhui; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
Fabrication of laterally driven bulk titanium devices on titanium-on-glass wafers 期刊论文
journal of micromechanics and microengineering, 2013
Zhang, Yiming; Li, Nannan; Yan, Bo; Feng, Xiaoyang; Hu, Jia; He, Shuwei; Hao, Yilong; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10
Chemical-Mechanical Polishing of Bulk Tungsten Substrate 其他
2013-01-01
Luo, Jin; Zhang, Yiming; Song, Lu; Chen, Shuhui; Bian, Yuan; Li, Tianyu; Hao, Yilong; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/16
In-situ measurement of ion angular distribution in bulk titanium DRIE for modeling the etch profile 其他
2013-01-01
Hu, Jia; He, Shuwei; Zhang, Yiming; Chen, Jing
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13
IAD  SU-8  overhang  stiction  DRIE  model  
Metallization introduced corrosion and parylene protection of surface micromachined polysilicon film with submicron capacitive gap 期刊论文
微电子工程, 2012
Zhang, Yiming; Wang, Yunda; Cai, Ming; Wang, Ying; Hao, Yilong; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10
Wafer level Tungsten-Glass Bonding with Photosensitive BCB 其他
2012-01-01
Shan, Yi; Li, Nannan; Zhu, Yunhui; Zhang, Yiming; Chen, Suhui; Luo, Jin; Hu, Jia; Chen, Jing; Jin, Yufeng
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/16
Design, fabrication and characterization of in-plane titanium microneedles for transdermal drug delivery 其他
2011-01-01
Li, Wen; Zhang, Yiming; Chen, Jing
收藏  |  浏览/下载：10/0  |  提交时间：2015/11/13
Wafer level bulk titanium ICP etching using SU8 as an etching mask 期刊论文
journal of micromechanics and microengineering, 2009
Zhao, Gang; Shu, Qiong; Tian, Yao; Zhang, Yiming; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10

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