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CORC

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Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy 期刊论文
IEEE Photonics Technology Letters, 2020, 卷号: 32, 期号: 9, 页码: 522-525
作者:  Wei, Haojie;  Hu, Song;  Tang, Yan;  Xie, Zhongye;  Liu, Xi
收藏  |  浏览/下载：12/0  |  提交时间：2021/05/11
3D Super-Resolution Reconstruction Using Microsphere-Assisted Structured Illumination Microscopy 期刊论文
IEEE Photonics Technology Letters, 2019, 卷号: 31, 期号: 22, 页码: 1783-1786
作者:  Xie, Zhongye;  Hu, Song;  Tang, Yan;  Liu, Xi;  Liu, Junbo
收藏  |  浏览/下载：42/0  |  提交时间：2021/05/06
Large range nano alignment for proximity lithography using complex grating 期刊论文
Optics and Laser Technology, 2019, 卷号: 112, 页码: 101-106
作者:  Tang, Yan;  Liu, Junbo;  Yang, Yong;  Hu, Song;  Zhao, Lixin
收藏  |  浏览/下载：8/0  |  提交时间：2021/05/06
Liquid Crystal Phase Control Method Based on Blazed Grating Model 会议论文
作者:  Hongyang Guo[1,2,3], Shengping Du[1.2]
收藏  |  浏览/下载：14/0  |  提交时间：2018/12/20
Dual-Channel Light Intensity Modulation Method for Focusing in Projection Lithography 期刊论文
IEEE PHOTONICS JOURNAL, 2016, 卷号: 8, 期号: 1
作者:  Li, Yanli;  Yan, Wei;  Hu, Song;  Feng, JinHua;  Wang, Jian
收藏  |  浏览/下载：13/0  |  提交时间：2016/06/27
Positioning control system of three-dimensional wafer stage of lithography 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850T
作者:  Tian, Peng;  Yan, Wei;  Yang, Fan;  Li, Fanxing;  Hu, Song
收藏  |  浏览/下载：22/0  |  提交时间：2018/06/14
Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process 期刊论文
IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 4
作者:  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  Xu, Xiangmin
收藏  |  浏览/下载：19/0  |  提交时间：2015/12/04
Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process 期刊论文
IEEE Photonics Journal, 2015, 卷号: 7, 期号: 4, 页码: 4900111
作者:  Zhou, Shaolin;  Yang, Yong;  Hu, Song;  Xu, Xiangmin
收藏  |  浏览/下载：18/0  |  提交时间：2016/11/23
Technology of focus detection for 193nm projection lithographic tool 会议论文
Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012
作者:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Xu, Feng;  Li, Jinglong
收藏  |  浏览/下载：9/0  |  提交时间：2016/11/24
Experimental analysis of solid immersion interference lithography based on backside exposure technique 期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 8, 页码: 2509-2512
作者:  Li, Xupeng;  Shi, Sha;  Zhang, Zhiyou;  Wang, Jingquan;  Li, Shuhong
收藏  |  浏览/下载：11/0  |  提交时间：2015/09/21

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