Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process

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	Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process
	Zhou, Shaolin 1; Yang, Yong 2; Hu, Song 2; Xu, Xiangmin 1
刊名	IEEE PHOTONICS JOURNAL
	2015-08-01
卷号	7 期号:4
关键词	Diffraction and gratings micro/nanofabrication phase modulation
ISSN号	1943-0655
英文摘要	The diffraction characteristics of several types of phase gratings often etched on the substrate by the micro/nanofabrication techniques are analytically explored using scalar-based analysis in this paper. The process of an incident wave being reflected or transmitted by the diffraction grating is regarded as a process of modulation, and the reflectance or transmittance can be unified as the modulation index. The mechanisms of phase modulation, amplitude modulation, and the amplitude-phase hybrid modulation in different situations are discussed. Analytical results indicate that the diffraction efficiency is directly determined by the phase difference of adjacent features, i. e., the cyclically distributed ridges and grooves that induce different phase and amplitude variations. The absolute phase grating with phase difference equivalent to pi has the maximum diffraction efficiency among all types of gratings. The conclusions could, in general, provide guidance for the design and micro/nanofabrication of phase gratings for many diffractionbased applications of optical metrology or imaging.
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Engineering, Electrical & Electronic ; Optics ; Physics, Applied
研究领域[WOS]	Engineering ; Optics ; Physics
关键词[WOS]	COUPLED-WAVE ANALYSIS ; TALBOT LITHOGRAPHY ; DIFFRACTION THEORY ; MOIRE FRINGE ; ALIGNMENT ; RESOLUTION ; LIMITS
收录类别	SCI
语种	英语
WOS记录号	WOS:000361069900025
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/3706]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	1.S China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510640, Guangdong, Peoples R China 2.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
推荐引用方式 GB/T 7714	Zhou, Shaolin,Yang, Yong,Hu, Song,et al. Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process[J]. IEEE PHOTONICS JOURNAL,2015,7(4).
APA	Zhou, Shaolin,Yang, Yong,Hu, Song,&Xu, Xiangmin.(2015).Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process.IEEE PHOTONICS JOURNAL,7(4).
MLA	Zhou, Shaolin,et al."Scalar-Based Analysis of Phase Gratings Etched in the Micro/nanofabrication Process".IEEE PHOTONICS JOURNAL 7.4(2015).