Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy

doi:10.1109/LPT.2019.2962720

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微电子装备总体研究室（四室）

	Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy
	Wei, Haojie 1,2; Hu, Song 1; Tang, Yan 1; Xie, Zhongye 1; Liu, Xi 1; He, Yu 1; Liu, Junbo 1
刊名	IEEE Photonics Technology Letters
	2020-05-01
卷号	32 期号:9 页码:522-525
ISSN号	1041-1135
DOI	10.1109/LPT.2019.2962720
文献子类	期刊论文
英文摘要	Traditional structured illumination microscopy (SIM) base on phase-shift algorithm requires multiple images for each scanning location to calculate the modulation depth response (MDR), which results in low measurement efficiency. In this letter, we develop an efficient method called tilted grating scanning structure illumination microscope (TS-SIM) to enhance the measurement speed. In this method, we scan the tilted grating in a direction perpendicular to the optical axis to generate the intensity curve for each pixel. After that, the Fourier transform algorithm is applied to extract the MDR curve for each pixel from the corresponding intensity. The position with the maximum value of MDR for each pixel is extracted to reshape the surface topography precisely. With this technique, only one image is demanded for each scanning position which significantly improves the efficiency, demonstrating the potential to be applied in fast measurement. The experiment and theoretical analysis are elaborated to verify the feasibility of the method. © 2019 IEEE.
语种	英语
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/10066]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China 2.Department of Materials and Optoelectronics, University of Chinese Academy of Sciences, Beijing; 100049, China;
推荐引用方式 GB/T 7714	Wei, Haojie,Hu, Song,Tang, Yan,et al. Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy[J]. IEEE Photonics Technology Letters,2020,32(9):522-525.
APA	Wei, Haojie.,Hu, Song.,Tang, Yan.,Xie, Zhongye.,Liu, Xi.,...&Liu, Junbo.(2020).Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy.IEEE Photonics Technology Letters,32(9),522-525.
MLA	Wei, Haojie,et al."Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy".IEEE Photonics Technology Letters 32.9(2020):522-525.