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Superposition of micropattern and microlens arrays for improved dynamic moiré pattern 期刊论文
Physica Scripta, 2020, 卷号: 95, 期号: 5
作者:  Huang, Peng;  He, Chuanwang;  Fan, Bin;  Dong, Xiaochun
收藏  |  浏览/下载：16/0  |  提交时间：2021/05/11
Elemental pattern capture method for realizing Glass moiré patterns 期刊论文
Optics Communications, 2020, 卷号: 456
作者:  Huang, Peng;  He, Chuanwang;  Fan, Bin;  Dong, Xiaochun
收藏  |  浏览/下载：7/0  |  提交时间：2021/05/11
Large range nano alignment for proximity lithography using complex grating 期刊论文
Optics and Laser Technology, 2019, 卷号: 112, 页码: 101-106
作者:  Tang, Yan;  Liu, Junbo;  Yang, Yong;  Hu, Song;  Zhao, Lixin
收藏  |  浏览/下载：8/0  |  提交时间：2021/05/06
Dynamic patterns based on the superposition of micropattern array and microlens array 期刊论文
OPTIK, 2018, 卷号: 174, 页码: 244-251
作者:  Huang, Peng;  He, Chuanwang;  Fan, Bin;  Dong, Xiaochun
收藏  |  浏览/下载：11/0  |  提交时间：2019/08/23
The leveling of mask and wafer in proximity nanolithography using fringe pattern phase analysis 期刊论文
OPTIK, 2014, 卷号: 125, 期号: 13, 页码: 3176-3180
作者:  Xu, Feng;  Zhou, Shaolin;  Hu, Song
收藏  |  浏览/下载：15/0  |  提交时间：2015/07/10
Single closed fringe pattern phase demodulation in alignment of nanolithography 期刊论文
OPTIK, 2013, 卷号: 124, 期号: 9, 页码: 818-823
作者:  Xu, Feng;  Hu, Song;  Yang, Yong;  Li, Jinlong;  Li, Lanlan
收藏  |  浏览/下载：17/0  |  提交时间：2015/04/17
Single closed fringe pattern phase demodulation in alignment of nanolithography 期刊论文
Optik, 2013, 卷号: 124, 期号: 9, 页码: 818-823
作者:  Xu, Feng;  Hu, Song;  Yang, Yong;  Li, Jinlong;  Li, Lanlan
收藏  |  浏览/下载：9/0  |  提交时间：2016/11/23
Research on method of measuring pattern distortion of circularly symmetrical phase etched CGHs and eliminating the effect of pattern distortion 会议论文
Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012
作者:  Deng, Chao;  Feng, Jie;  Xing, Tingwen
收藏  |  浏览/下载：11/0  |  提交时间：2016/11/23
Fringe pattern analysis for optical alignment in nanolithography using two-dimentional Fourier transform 期刊论文
OPTICAL ENGINEERING, 2011, 卷号: 50, 期号: 8
作者:  Xu, Feng;  Song, Hu;  Zhou, Shaolin
收藏  |  浏览/下载：13/0  |  提交时间：2015/09/21
Fourier-based analysis of moire fringe patterns of superposed gratings in alignment of nanolithography 期刊论文
OPTICS EXPRESS, 2008, 卷号: 16, 期号: 11, 页码: 7869-7880
作者:  Zhou, Shaolin;  Fu, Yongqi;  Tang, Xiaoping;  Hu, Song;  Chen, Wangfu
收藏  |  浏览/下载：13/0  |  提交时间：2015/09/21

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