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Characterizing curved surface roughness of Wolter-I X-ray grazing incidence telescope 期刊论文
Chinese Optics, 2019, 卷号: 12, 期号: 3, 页码: 587-595
作者:  Y.-C.Zhang;  P.Liu;  X.-G.Wang;  L.-P.He;  B.Chen
收藏  |  浏览/下载：1/0  |  提交时间：2020/08/24
Design of a compact spectrometer under grazing incidence conditions for near-edge X-ray absorption spectroscopy;X 期刊论文
Chinese Optics, 2018, 卷号: 11, 期号: 2, 页码: 265-278
作者:  Chen, Chen-Xi-Yang;  Jin, Chun-Shui;  Wang, Jun;  Xie, Yao
收藏  |  浏览/下载：5/0  |  提交时间：2019/09/17
Mechanical design and finite element analyses of surface bending mechanism for X-ray optics 期刊论文
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, 2018, 卷号: 53, 页码: 107-119
作者:  Gong, X. P.;  Lu, Q. P.;  Wang, Y.;  Song, Y.
收藏  |  浏览/下载：10/0  |  提交时间：2019/09/17
Image quality evaluation of Wolter X-ray nested telescope 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2016, 卷号: 36, 期号: 3
作者:  Zhao, D.;  B. Chen;  P. Liu and L. He
收藏  |  浏览/下载：14/0  |  提交时间：2017/09/11
Development of the depth-graded multilayers for XTP mission 会议论文
Space Telescopes and Instrumentation 2014: Ultraviolet to Gamma Ray, June 22, 2014 - June 26, 2014, Montreal, QC, Canada
Jiang L.; Qi R.; Wen M.; Zhang Z.; Ma B.; Wang Z.; Bai Y.
收藏  |  浏览/下载：16/0  |  提交时间：2015/04/27
Influence of background pressure on the microstructure and optical properties of Mo/Si multilayers fabricated by magnetron sputtering 期刊论文
Science China: Physics, Mechanics and Astronomy, 2013, 卷号: 56, 期号: 9
Lv P.; Zhang Z.; Guan J.; Wang X.; Hou X.; Zhang L.; Wang J.; Chen B.; Guan Q.
收藏  |  浏览/下载：28/0  |  提交时间：2014/05/14
Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar2-CHF3 ion-beam etching through a rectangular photoresist mask (EI CONFERENCE) 会议论文
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China
Tan X.
收藏  |  浏览/下载：20/0  |  提交时间：2013/03/25
In ultraviolet spectroscopy  groove irregularity and surface roughness of nanometer magnitude can cause a significant loss of diffraction efficiency. Therefore  there is a constant need to improve the diffraction efficiency. A blazed grating can concentrate most of the light intensity into a desired diffraction order  it is important to control the groove shape precisely  so it is the optimum choice among gratings of different kinds of profile. As the operating wavelength of most UV spectral applications is less than 200 nm  especially the blaze angle and the apical angle. We have presented a direct shaping method to fabricate EUV blazed gratings by using an ion-beam mixture of Ar+ and CHF2 +to etch K9 glass with a rectangular photoresist mask. With this method  the required blaze angle is small  we have succeeded in fabricating well-shaped UV blazed gratings with a 1200 line/mm groove density and 8.54 blaze angles and 1200 line/mm groove density and 11.68 blaze angles  and the metrical efficiency is about 81% and 78%. The good performance of the gratings was verified by diffraction efficiency measurements. When one uses the etching model  the conditions on the ion-beam grazing incident angle and the CHF3partial pressure should be noted. Besides  since the etched groove shape depends on the aspect ratio of the photoresist mask ridge  if we wish to fabricate larger gratings with this method  we must improve the uniformity of the photoresist mask before ion-beam etching. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).  
Ion beam sputter deposition of zirconia thin films (EI CONFERENCE) 会议论文
International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China
Jin W.; Jin C.; Liu L.; Zhu H.; Yang H.
收藏  |  浏览/下载：13/0  |  提交时间：2013/03/25
We determined the optical constants (the refractive index n and the extinction coefficient k) of ion beam sputter deposited zirconia thin films with spectroscopic ellipsometry (SE). First  we obtained the structure information (the layer thickness  surface roughness and layer diffusion) by fitting the grazing x-ray reflection (GXRR) spectra. The fitted surface roughness is verified by atomic force micrometer (AFM) measurement. Second  based on the acquired structure information  the measured ellipsometry spectra are fitted in the range of 240-800nm at an incident angle of 70.25 degree. The optical constants are solved based on the Tauc-Lorentz dispersion. The optical band gap extracted by SE is 4.79eV. Finally  the optical band gap is verified by Taue plot method  which is well consistent with that of SE.  
Analysis of the thickness measurement of multilayer optical thin films with grazing incident X-ray 会议论文
1998
Li X. Q.; Song X. W.; Qu Y.; Li M.; Zhang X. D.
收藏  |  浏览/下载：10/0  |  提交时间：2013/03/28

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