Characterizing curved surface roughness of Wolter-I X-ray grazing incidence telescope

doi:10.3788/CO.20191203.0587

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Characterizing curved surface roughness of Wolter-I X-ray grazing incidence telescope
	Y.-C.Zhang; P.Liu; X.-G.Wang; L.-P.He; B.Chen
刊名	Chinese Optics
	2019
卷号	12 期号:3 页码:587-595
关键词	Surface roughness,Mirrors,Power spectral density,Spectral density,Surface measurement,Surface scattering,Telescopes,X ray scattering
ISSN号	20951531
DOI	10.3788/CO.20191203.0587
英文摘要	The X-ray scattering method is investigated in application of characterizing surface roughness of X-ray grazing incidence telescope.The surface figure effect on the scattering diagram of the curved rough mirror is analyzed in detail based on generalized Harvey-Shack surface scatter theory and image formation theory, when smooth-surface approximation is met and the width of the incident beam is about one tenth of spatial wavelength of the surface figure.Based on the analysis, the characterizing scheme is designed and the determination error of the one-dimensional power spectral density function due to the finite width of the receiving slit before the detector is discussed.The scheme is simulated with Zemax and the simulated results verify that the surface figure only affects the measuring accuracy of the low-spatial-frequency surface roughness.The method overcomes difficulty in measuring roughness of the grazing incidence mirror with high resolution conveniently during the development of the X-ray grazing incidence telescope.2019, China Science Publishing & Media LTD.All right reserved.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/62770]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y.-C.Zhang,P.Liu,X.-G.Wang,et al. Characterizing curved surface roughness of Wolter-I X-ray grazing incidence telescope[J]. Chinese Optics,2019,12(3):587-595.
APA	Y.-C.Zhang,P.Liu,X.-G.Wang,L.-P.He,&B.Chen.(2019).Characterizing curved surface roughness of Wolter-I X-ray grazing incidence telescope.Chinese Optics,12(3),587-595.
MLA	Y.-C.Zhang,et al."Characterizing curved surface roughness of Wolter-I X-ray grazing incidence telescope".Chinese Optics 12.3(2019):587-595.