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	Ion beam sputter deposition of zirconia thin films (EI CONFERENCE)
	Jin W. ; Jin C. ; Liu L. ; Zhu H. ; Yang H.
	2008
会议名称	International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007
会议地点	Beijing, China
关键词	We determined the optical constants (the refractive index n and the extinction coefficient k) of ion beam sputter deposited zirconia thin films with spectroscopic ellipsometry (SE). First we obtained the structure information (the layer thickness surface roughness and layer diffusion) by fitting the grazing x-ray reflection (GXRR) spectra. The fitted surface roughness is verified by atomic force micrometer (AFM) measurement. Second based on the acquired structure information the measured ellipsometry spectra are fitted in the range of 240-800nm at an incident angle of 70.25 degree. The optical constants are solved based on the Tauc-Lorentz dispersion. The optical band gap extracted by SE is 4.79eV. Finally the optical band gap is verified by Taue plot method which is well consistent with that of SE.
收录类别	EI
内容类型	会议论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/33709]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Jin W.,Jin C.,Liu L.,et al. Ion beam sputter deposition of zirconia thin films (EI CONFERENCE)[C]. 见:International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007. Beijing, China.

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