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Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity 会议论文
International Journal of Nanotechnology, 2015
作者:  Shi, Zhendong;  Fang, Liang;  Zhou, Chongxi
收藏  |  浏览/下载:20/0  |  提交时间:2016/11/25
Maskless lithography alignment method based on phase-shifting Moiré fringes technique 会议论文
Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012
作者:  Zhu, Jiangping;  Hu, Song;  Yu, Junsheng;  Tang, Yan
收藏  |  浏览/下载:14/0  |  提交时间:2016/11/24
A novel wavefront sensing technique for high speed atmospheric measurement based on digital micromirror device 会议论文
Proceedings of SPIE - The International Society for Optical Engineering, v 8178, 2011, Optics in Atmospheric Propagation and Adaptive Systems XIV, 2011
作者:  Yang Ping;  Wang Shuai;  Ao Mingwu;  Xu Bing
收藏  |  浏览/下载:12/0  |  提交时间:2016/11/24
Methods of eliminating the grid effect based on DMD technique of maskless lithography 会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, 2010
作者:  Yanli Li;  Wei Yan;  Jian Wang;  Yong Yang;  Lixin Zhao
收藏  |  浏览/下载:7/0  |  提交时间:2016/11/24
Research on digital gray-tone projection lithography 会议论文
Proceedings of SPIE, 2009
作者:  Wang Jian;  Zhao Lixin;  Yan WEi;  Xu Wenxiang;  Hu Song
收藏  |  浏览/下载:11/0  |  提交时间:2016/11/24


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