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	Research on digital gray-tone projection lithography
	Wang Jian; Zhao Lixin; Yan WEi; Xu Wenxiang; Hu Song; Tang Xiaoping; Wang Zhaozhi; Wang Shurong; Zhang Zhengrong
	2009
会议名称	Proceedings of SPIE
会议日期	2009
卷号	7284
通讯作者	Wang Jian
中文摘要	With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures.
英文摘要	With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures.
收录类别	EI
语种	英语
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7634]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	中国科学院光电技术研究所
推荐引用方式 GB/T 7714	Wang Jian,Zhao Lixin,Yan WEi,et al. Research on digital gray-tone projection lithography[C]. 见:Proceedings of SPIE. 2009.

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