CORC

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CORC

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Fracture properties of silicon carbide thin films by bulge test of long rectangular membrane 期刊论文
IEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2008, 卷号: 17, 期号: 5 Pages, 页码: 453-461
Zhou, W; Yang, JL; Sun, GS; Liu, XF; Yang, FH; Li, JM
收藏  |  浏览/下载：6/0  |  提交时间：2012/05/12
Silicon carbide formation by methane plasma immersion ion implantation into silicon 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 卷号: 21, 期号: 4, 页码: 1375-1379
An, ZH; Fu, RKY; Chen, P; Liu, WL; Chu, PK; Lin, CL
收藏  |  浏览/下载：11/0  |  提交时间：2012/03/24
Thermochemical process occurring in PLD-derived SiC films during vacuum annealing 期刊论文
APPLIED SURFACE SCIENCE, 2002, 卷号: 193, 期号: 1-4, 页码: 204-209
Wang, YX; He, HP; Wang, LW; Liu, D; Tang, HG
收藏  |  浏览/下载：13/0  |  提交时间：2012/03/24
Preparation of SiC thin films by DC magnetron sputtering and their application in microsensors 期刊论文
SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS, 2001, 期号: 0, 页码: 1432-1437
Yu,YH; Song,R; Zou,SC; Wong,SP; Wilson,IH
收藏  |  浏览/下载：14/0  |  提交时间：2012/03/24
Structural and optical properties of SiC films deposited on Si by DG magnetron sputtering 期刊论文
SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000, 2001, 卷号: 353-356, 期号: 0, 页码: 191-194
Lei,YM; Yu,YH; Cheng,LL; Lin,L; Sundaraval,B; Luo,EZ; Lin,S; Ren,CX; Cheung,WY; Wong,SP; Xu,JB; Zou,SC; Wilson,IH
收藏  |  浏览/下载：12/0  |  提交时间：2012/03/24
ALLOYS  
Structural and electrical characteristics of oxygen-implanted 6H-SiC 期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 卷号: 169, 页码: 1-5
Wang, LW; Huang, JP; Duo, XZ; Song, ZT; Lin, CL; Zetterling, CM; Ostling, M
收藏  |  浏览/下载：15/0  |  提交时间：2012/03/24
Investigation of damage behaviour and isolation effect of n-type 6H-SiC by implantation of oxygen 期刊论文
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2000, 卷号: 33, 期号: 12, 页码: 1551-1555
Wang, LW; Huang, JP; Duo, XZ; Song, ZT; Lin, CL; Zetterling, CM; Ostling, M
收藏  |  浏览/下载：9/0  |  提交时间：2012/03/24
Effect of annealing on SiC thin films prepared by pulsed laser deposition 期刊论文
DIAMOND AND RELATED MATERIALS, 1999, 卷号: 8, 期号: 12, 页码: 2099-2102
Huang, JP; Wang, LW; Wen, J; Wang, YX; Lin, CL; Ostling, M
收藏  |  浏览/下载：28/0  |  提交时间：2012/03/25
Effects of titanium and aluminum incorporations on the structure of boron nitride thin films 期刊论文
Diamond and Related Materials 8(1999)386-390；Presented at the Diamond'98,Conference Information: 9th European Conference on Diamond, Diamond-like Materials, Nitrides and Silicon Carbide (Diamond 1998), SEP 13-18, 1998 IRAKLION, GREECE, 1999, 卷号: 8, 页码: 386-390
A. Kolitsch, X. Wang, D. Manova, W. Fukarek, H. Reuther and W. Moeller
收藏  |  浏览/下载：25/0  |  提交时间：2012/06/19
Growth of SiC thin films on (100) and (111) silicon by pulsed laser deposition combined with a vacuum annealing process 期刊论文
WIDE-BANDGAP SEMICONDUCTORS FOR HIGH-POWER, HIGH-FREQUENCY AND HIGH-TEMPERATURE APPLICATIONS-1999, 1999, 卷号: 572, 页码: 207-212
Huang, JP; Wang, LW; Wen, U; Wang, YX; Lin, CL; Zetterling, CM; Ostling, M
收藏  |  浏览/下载：13/0  |  提交时间：2012/03/25

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