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Improvement of total-dose irradiation hardness of silicon-on-insulator materials by modifying the buried oxide layer with ion implantation 期刊论文
CHINESE PHYSICS, 2006, 卷号: 15, 期号: 4, 页码: 792-797
Zhang, EX; Qian, C; Zhang, ZX; Lin, CL; Wang, X
收藏  |  浏览/下载:14/0  |  提交时间:2012/03/24
Effect of nitrogen implantation technologies on total dose rad-hardness of SIMON materials 期刊论文
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 2005, 卷号: 26, 期号: 6, 页码: 1269-1272
Zhang, Enxia1; Qian, Cong1; Zhang, Zhengxuan1; Wang, Xi1; Zhang, Guoqiang2; Li, Ning2; Zheng, Zhongshan2; Liu, Zhongli2
收藏  |  浏览/下载:23/0  |  提交时间:2012/03/24
Radiation hardness improvement of separation-by-implantation-of-oxygen/silicon-on-insulator material by nitrogen ion implantation 期刊论文
JOURNAL OF ELECTRONIC MATERIALS, 2005, 卷号: 34, 期号: 11, 页码: L53-L56
Zhang, EX; Sun, JY; Chen, J; Zhang, ZX; Wang, X; Li, N; Zhang, GQ; Liu, ZL
收藏  |  浏览/下载:9/0  |  提交时间:2012/03/24
CHARGE  OXYGEN  
Research on the effect of nitrogen implantation doses on the structure of separation by implantation of oxygen and nitrogen 期刊论文
SMART MATERIALS & STRUCTURES, 2005, 卷号: 14, 期号: 4, 页码: N42-N45
Zhang, EX; Yi, WB; Chen, J; Zhang, ZX; Wang, X
收藏  |  浏览/下载:10/0  |  提交时间:2012/03/24
具有复合埋层的新型SIMON材料的制备 期刊论文
半导体学报, 2004, 期号: 07
易万兵; 陈猛; 张恩霞; 刘相华; 陈静; 董业民; 金波; 刘忠立; 王曦
收藏  |  浏览/下载:8/0  |  提交时间:2012/01/06


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