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Rapid thermal annealing of arsenic implanted Si1-xGex epilayers 期刊论文
nuclear instruments & methods in physics research section b-beam interactions with materials and atoms, 1997, 卷号: 122, 期号: 4, 页码: 639-642
Zou LF; Wang ZG; Sun DZ; Fan TW; Liu XF; Zhang JW
收藏  |  浏览/下载:13/0  |  提交时间:2010/11/17
Damage removal and strain relaxation in As+-implanted Si0.57Ge0.43 epilayers grown by gas source molecular beam epitaxy 期刊论文
chinese physics letters, 1997, 卷号: 14, 期号: 3, 页码: 209-212
Zou LF; Wang ZG; Sun DZ; Fan TW; Liu XF; Zhang JW
收藏  |  浏览/下载:14/0  |  提交时间:2010/11/17
Diffusion of ion implanted as in Si1-xGex epilayers 期刊论文
chinese physics letters, 1997, 卷号: 14, 期号: 1, 页码: 51-54
Zou LF; Wang ZG; Sun DZ; Fan TW; Liu XF; Zhang JW
收藏  |  浏览/下载:7/0  |  提交时间:2010/11/17
Aggregation and precipitation in high dose as ion implanted Ge0.5Si0.5 alloy 期刊论文
nuclear instruments & methods in physics research section b-beam interactions with materials and atoms, 1996, 卷号: 119, 期号: 4, 页码: 510-514
Fan TW; Zou LF; Wang ZG; Hemment PLF; Greaves SJ; Watts JF
收藏  |  浏览/下载:21/0  |  提交时间:2010/11/17


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