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长春光学精密机械与物... [2]
厦门大学 [1]
内容类型
会议论文 [2]
学位论文 [1]
发表日期
2009 [3]
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Optical system of large relative aperture and wide field using aspheric corrector for detecting (EI CONFERENCE)
会议论文
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China
Ming M.
;
Wang J.
;
Zhang J.
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浏览/下载:16/0
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提交时间:2013/03/25
The magnitude requirement of space target detecting determines that the image of detecting telescope should have several performances: small spots
the wider field of view
small 80% encircled energy diameter and good MTF(Modulation transfer function). So the aperture and field of view of optical system have some demands accordingly. The larger aperture
the more extensive range which the telescope searches. Now most of ground telescopes whose apertures are from 500mm to 1000mm is on-axis optical system
the more energy that telescope collects and higher magnitude the telescope detects
so wide field of view becomes the most importance problem. To obtain large relative aperture and wide field of view
the paper introduces a catadioptric telescope with small aperture aspheric refractive corrector
whose conic surface will be used to remove the aberrations due to large relative aperture and wide field of view. As to the optical system
there is only one aspheric refractive corrector
and it is relatively easy for manufacturing because of its concave figure and normal material. The paper gives the example
and optimizes this optical system with ZEMAX program. And then the paper provides a specific analysis program for testing the aspheric refractive corrector. The aperture of this optical system is 750mm
and its relative aperture is 0.82
and the field of view is 3.6 diameter(diagonal). Its structure is simple and the image quality is also very good. 2009 SPIE.
Design and tolerance analysis of compensator for high order aspheric surface testing (EI CONFERENCE)
会议论文
2009 International Conference on Optical Instruments and Technology - Optoelectronic Measurement Technology and Systems, October 19, 2009 - October 22, 2009, Shanghai, China
Chen X.
;
Liu W.
;
Kang Y.
;
Wei Z.
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浏览/下载:19/0
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提交时间:2013/03/25
High accuracy is required in surface testing of 90nm nodal point lithography projecting lens. By comparing various aspheric surface testing methods
the structure layout of the compensator is a meniscus positive lens combined with a Plano-convex positive lens. The design results indicate that: primary and high order aberrations are balanced well
we adopt Offner null compensator to test the aspheric surface in the point diffraction interferometer at last. In this paper
MTF exceeds diffraction limit
an Offner compensator is presented on the base of the third order aberration theory to test concave aspheric surface
root-mean-square (RMS) of wave front error /167. The F-number of the system can achieve F/1.64. By the analysis of the process of aspheric surface testing with the designed system
the optical construction parameters of which is determined by introducing equal-quantities spherical aberration to compensate all orders of aspheric coefficients. The field of view of the system is 0.02
a loosen distribution of the tolerance was presented based on the accuracy of measuring apparatus. 2009 SPIE.
高精度光学元件微电铸技术研究
学位论文
2009, 2009
李洪友
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浏览/下载:3/0
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提交时间:2016/02/14
微电铸
双向脉冲电流
高精光学元件
微光学非球面
Micro Electroforming
Bipolar pulse current
High Precision Optics
Micro Optical Aspheric Surface
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