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科研机构
西安交通大学 [6]
清华大学 [3]
北京大学 [3]
北京航空航天大学 [1]
沈阳自动化研究所 [1]
内容类型
期刊论文 [7]
会议论文 [5]
其他 [2]
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2019 [2]
2015 [1]
2014 [2]
2013 [1]
2011 [1]
2010 [3]
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浏览/检索结果:
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Wafer-level fabrication of low power consumption integrated alcohol microsensor
期刊论文
MICRO & NANO LETTERS, 2019, 卷号: 14, 页码: 11-16
作者:
Wang, Hairong
;
Wang, Mengya
;
Lei, Weitao
;
Chen, Xiaowei
;
Huang, Hao
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2019/11/19
nanocomposites
electrodes
membranes
alcohol detection
sputter deposition
organic compounds
suspensions
gas sensors
temperature sensors
power 39
microsensors
microelectromechanical systems micromachining technology
wafer-level sensor chips
electrochemical electrodes
micromachining
TiO2-SnO2
magnetron sputtering
temperature measurement
power consumption
suspended membrane
power measurement
0 mW
nanosensors
titanium compounds
low power consumption integrated alcohol microgas sensor
microheater
wafer-level fabrication
tin compounds
Photo-Thermoelectric Thin-Film Generator and Sensor With Ultrahigh Output Voltage and Large Responsivity
期刊论文
IEEE ELECTRON DEVICE LETTERS, 2019, 卷号: 40, 页码: 1832-1835
作者:
Guo, Zhanpeng
;
Zhu, Wei
;
Yu, Yuedong
;
Deng, Yuan
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/30
Films
Lighting
Sensors
Substrates
Temperature
Plasma temperature
Generators
Light sensing
micromachining technology
photo-thermoelectric thin-film device
responsivity
Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation
期刊论文
Micro & Nano Letters, 2015, 卷号: 10, 期号: [db:dc_citation_issue], 页码: 491-495
作者:
Zhao, Yulong
;
Li, Cun
;
Hao, Mengmeng
;
Cheng, Rongjun
;
Fan, Xiaole
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
thin film
finite element method
flammable areas
fibre conducts
light intensity modulation
silicon compounds
microsensors
bulk micromachining technology
optical microelectromechanical-system pressure sensor
combustible areas
optical cables
intensity modulation
pressure sensors
silicon diaphragm deformation
micromachining
pressure measurement
finite element analysis
optical cable
reflected light intensity shift
pressure 0 MPa to 20 MPa
signal transmission
photoelectric detection circuit
micro-optomechanical devices
elemental semiconductors
optical modulation
thin films
source light
silicon
fibre optic sensors
Feasibility Study of a Pressure Sensor Based on Double-Ended Tuning Fork Quartz Resonator
会议论文
作者:
Cheng, Rongjun
;
Zhao, Yulong
;
Li, Cun
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/02
resonant
quartz resonator
pressure sensor
micromachining technology
Packaging a piezoresistive pressure sensor for intracranial pressure monitoring
会议论文
作者:
Meng, Xiawei
;
Zhao, Yulong
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
Biomedical applications
Implantable sensors
Intra-cranial pressure
Miniaturization
Piezo-resistive
Piezoresistive pressure sensors
Silicon bulk micromachining technology
Single-crystal silicon wafers
Overview of micro-force sensing methods
会议论文
2013 International Conference on Mechatronics and Information Technology, ICMIT 2013, Guilin, China, October 19-20, 2013
作者:
Ma CZ(马超哲)
;
Du JS(杜劲松)
;
Liu YY(刘意杨)
;
Chu YK(褚云凯)
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  |  
浏览/下载:28/0
  |  
提交时间:2014/04/16
Information technology
Micromachining
Processing
Design and thermal analysis of a micro-chamber PCR integrated chip
期刊论文
Chinese Journal of Sensors and Actuators, 2011, 卷号: 24, 期号: [db:dc_citation_issue], 页码: 1092-1097
作者:
Liu, Yimin
;
Nie, Jinquan
;
Zhao, Yulong
;
Peng, Niancai
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2019/12/10
Lumped parameter method
Micromachining technology
Pcr chip
Thermal analysis
Fabrication of (K,Na)NbO/sub 3/ lead-free piezoceramic microrod arrays by sol-gel processing with micromachined silicon templates
期刊论文
2010, 2010
Ying Xu
;
Dawei Liu
;
Fengping Lai
;
Yuhua Zhen
;
Jing-Feng Li
收藏
  |  
浏览/下载:4/0
Fabrication of Si/sub 3/N/sub 4/ micro-components by a combined microfabrication process
会议论文
Key Engineering Materials, International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites (ISASC 2004), Gyeongju, South Korea, INSPEC
Jing-Feng Li
;
Songzhe Jin
;
Yong Li
收藏
  |  
浏览/下载:2/0
Preparation and in vitro release of glipzide loaded controlled release microspheres
期刊论文
2010, 2010
Jiang Tianmin
;
Tan Fengping
;
Du Jiali
;
Ding Fuxin
收藏
  |  
浏览/下载:3/0
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