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	Fabrication of Si/sub 3/N/sub 4/ micro-components by a combined microfabrication process
	Jing-Feng Li ; Songzhe Jin ; Yong Li
	2010-05-10 ; 2010-05-10
会议名称	Key Engineering Materials ; International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites (ISASC 2004) ; Gyeongju, South Korea ; INSPEC
关键词	Experimental/ ceramics machinability micromachining micromechanical devices powder technology powders silicon compounds sintering/ microcomponents microfabrication process Si-based high-temperature ceramics power microelectromechanical systems microscale gas turbines microcombustors microreactors microfabrication Si/sub 3/N/sub 4/ ceramics presintering Si powder compacts micromachining Si preforms reaction sintering 3-dimensional microfabrication machinability near-net shaping characteristic micro nozzle arrays microrotor Si/sub 3/N/sub 4// A8120L Preparation of ceramics and refractories A8120E Powder techniques, compaction and sintering A0710C Micromechanical devices and systems E2160 Micromechanics (mechanical engineering) E2200 Mechanical components, systems and devices/ Si3N4/bin Si3/bin N4/bin Si/bin N/bin
中文摘要	Si-based high-temperature ceramics are attractive materials for power microelectromechanical systems (power MEMS), such as microscale gas turbines, micro-combustors and micro-reactors. This presentation introduces a novel process for the microfabrication of Si/sub 3/N /sub 4/ ceramics, which mainly consists of pre-sintering of Si powder compacts, micromachining of pre-sintered Si preforms and reaction sintering of the micromachined Si preforms. The present process has its high potential for Si/sub 3/N/sub 4/ 3-dimensional microfabrication because it combines the machinability of pre-sintered Si powder compacts and near-net shaping characteristic of S/sub 3/N /sub 4/ reaction sintering. Si/sub 3/N/sub 4/ micro-components such as micro nozzle arrays and micro-rotor were fabricated by using the present process.
会议录出版者	Trans Tech Publications ; Switzerland
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/18022]
专题	清华大学
推荐引用方式 GB/T 7714	Jing-Feng Li,Songzhe Jin,Yong Li. Fabrication of Si/sub 3/N/sub 4/ micro-components by a combined microfabrication process[C]. 见:Key Engineering Materials, International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites (ISASC 2004), Gyeongju, South Korea, INSPEC.

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