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长春光学精密机械与物... [1]
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会议论文 [1]
发表日期
2006 [1]
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Study of micro-actuator with electrostatic actuating (EI CONFERENCE)
会议论文
ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China
Sun D.-M.
;
Dong W.
;
Wang G.-D.
;
Liu C.-X.
;
Chen W.-Y.
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提交时间:2013/03/25
The micro-actuator with the torsion beam and the cantilever beam on silicon is designed and analyzed
which is actuated by electrostatic force. Based on the torsion dynamics theory
the technique and relative formula are presented for analyzing the actuating voltage and the switching time
on which the effect of the air squeeze film damping is already considered. The optimized results of the structural parameters are compared between this technique and the finite element modeling (FEM). The optimized result of parameters is as: length
width and thickness of the torsion beam are 700
12 and 10m
length and width of the cantilever beam are 1900 and 1000m
length and width of the balance beam are 100 and 1000m
and distance of the upper and lower electrodes is 55m
respectively. The actuating voltage is about 50 V
and the switching time Toff and Ton are about 5 and 12 ms
respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on micro-actuator. Finally
an optical technique is described for the measurement of the actuating voltage and switching time of the device
and the difference between the experimental results and theoretical datum is discussed.
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