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	Study of micro-actuator with electrostatic actuating (EI CONFERENCE)
	Sun D.-M. ; Dong W. ; Wang G.-D. ; Liu C.-X. ; Chen W.-Y.
	2006
会议名称	ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005
会议地点	Changchun, China
关键词	The micro-actuator with the torsion beam and the cantilever beam on silicon is designed and analyzed which is actuated by electrostatic force. Based on the torsion dynamics theory the technique and relative formula are presented for analyzing the actuating voltage and the switching time on which the effect of the air squeeze film damping is already considered. The optimized results of the structural parameters are compared between this technique and the finite element modeling (FEM). The optimized result of parameters is as: length width and thickness of the torsion beam are 700 12 and 10m length and width of the cantilever beam are 1900 and 1000m length and width of the balance beam are 100 and 1000m and distance of the upper and lower electrodes is 55m respectively. The actuating voltage is about 50 V and the switching time Toff and Ton are about 5 and 12 ms respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on micro-actuator. Finally an optical technique is described for the measurement of the actuating voltage and switching time of the device and the difference between the experimental results and theoretical datum is discussed.
收录类别	EI
内容类型	会议论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/33669]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Sun D.-M.,Dong W.,Wang G.-D.,et al. Study of micro-actuator with electrostatic actuating (EI CONFERENCE)[C]. 见:ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005. Changchun, China.

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