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科研机构
上海大学 [17]
清华大学 [1]
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期刊论文 [12]
会议论文 [6]
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AIBA as Free Radical Initiator for Abrasive-Free Polishing of Hard Disk Substrate
期刊论文
JOURNAL OF ELECTRONIC MATERIALS, 2015, 卷号: 44, 页码: 1245-1252
作者:
Lei, Hong[1]
;
Ren, Xiaoyan[2]
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/04/26
Abrasive-free polishing
hard disk substrate
material removal rate
initiator
AIBA
Preparation of porous alumina-g-polystyrene sulfonic acid abrasive and its chemical mechanical polishing behavior on hard disk substrate
期刊论文
MICROELECTRONIC ENGINEERING, 2014, 卷号: 116, 页码: 11-16
作者:
Huang, Liqin[1]
;
Wang, Zhijun[2]
;
Lei, Hong[3]
;
Chen, Ruling[4]
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2019/04/30
Chemical mechanical polishing (CMP)
Porous alumina-g-polystyrene sulfonic acid abrasive
Hard disk substrate
Planarization
Influence of Zn (II) ion on abrasive-free polishing of hard disk substrate
期刊论文
THIN SOLID FILMS, 2014, 卷号: 562, 页码: 377-382
作者:
Lei, Hong[1]
;
Zhao, Rong[2]
;
Chen, Ruling[3]
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/04/30
Abrasive-free polishing
Hard disk substrate
Zinc (II) Ion
Material removal rate
Tribochemistry
Abrasive-free polishing of hard disk substrate with H2O2-K2S2O8-NaHSO3 slurry
会议论文
MATERIAL DESIGN, PROCESSING AND APPLICATIONS, PARTS 1-4, 2013-03-30
作者:
Zhang, Weitao[1]
;
Lei, Hong[2]
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/04/30
Abrasive-free polishing (AFP)
hard disk substrate
material removal rate (MRR)
initiator
Effect of K2S2O8 on material removal rate in abrasive-free polishing of hard disk substrate
会议论文
MATERIAL DESIGN, PROCESSING AND APPLICATIONS, PARTS 1-4, 2013-03-30
作者:
Zhao, Rong[1]
;
Lei, Hong[2]
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/04/30
abrasive-free polishing
hard disk substrate
material removal rate
K2S2O8 initiator
Abrasive-free polishing of hard disk substrate with H2O2-C4H10O2-Na2S2O5 slurry
期刊论文
FRICTION, 2013, 卷号: 1, 页码: 359-366
作者:
Zhang, Weitao[1]
;
Lei, Hong[2]
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/04/30
abrasive-free polishing
material removal rate
initiator
hard disk substrate
Effect of pH on hard disk substrate polishing in glycine-hydrogen peroxide system abrasive-free slurry
会议论文
MICRO-NANO TECHNOLOGY XIV, PTS 1-4, 2012-11-04
作者:
Chen Sisi[1]
;
Lei Hong[2]
;
Chen Ruling[3]
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/04/30
abrasive free polishing (AFP)
glycine
hydrogen peroxide
hard disk substrate
Preparation of copper-incorporated mesoporous alumina abrasive and its CMP behavior on hard disk substrate
期刊论文
POWDER TECHNOLOGY, 2012, 卷号: 219, 页码: 99-104
作者:
Lei, Hong[1]
;
Jiang, Lei[2]
;
Chen, Ruling[3]
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/04/30
Chemical mechanical polishing (CMP)
Copper-incorporated mesoporous alumina abrasive
Hard disk substrate
Polishing active element
Preparation of porous alumina abrasives and their chemical mechanical polishing behavior
期刊论文
THIN SOLID FILMS, 2012, 卷号: 520, 页码: 2868-2872
作者:
Lei, Hong[1]
;
Wu, Xin[2]
;
Chen, Ruling[3]
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/04/30
Chemical mechanical polishing (CMP)
Porous alumina abrasive
Hard disk substrate
Planarization
Preparation of porous Fe2O3/SiO2 nanocomposite abrasives and their chemical mechanical polishing behaviors on hard disk substrates
期刊论文
THIN SOLID FILMS, 2012, 卷号: 520, 页码: 6174-6178
作者:
Li, Hu[1]
;
Lei, Hong[2]
;
Chen, Ruling[3]
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/04/30
Chemical mechanical polishing
Hard disk substrate
Porous Fe2O3/SiO2 nanocomposite
Material removal rate
Polishing active element
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