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Morphological and structural damage investigation of nanostructured molybdenum fuzzy surface after pulsed plasma bombardment
期刊论文
CHINESE PHYSICS B, 2022, 卷号: 31
作者:
Luo, Yu-Chuan
;
Yan, Rong
;
Pu, Guo
;
Wang, Hong-Bin
;
Wang, Zhi-Jun
收藏
  |  
浏览/下载:30/0
  |  
提交时间:2022/05/05
molybdenum nanostructured fuzz
pulsed-H plasma
edge localized mode
etching process
The application of the scallop nanostructure in deep silicon etching
期刊论文
NANOTECHNOLOGY, 2020, 卷号: 31, 期号: 31, 页码: 1-11
作者:
Lin, Yuanwei
;
Yuan, Renzhi
;
Zhou, Ce
;
Dong, Zihan
;
Su, Ziduo
收藏
  |  
浏览/下载:56/0
  |  
提交时间:2021/09/14
deep silicon etching
Bosch process
scallop nanostructure
fluorocarbon polymer
minimum effect
Alkaline-Etched NiMgAl Trimetallic Oxide-Supported KMoS-Based Catalysts for Boosting Higher Alcohol Selectivity in CO Hydrogenation
期刊论文
ACS APPLIED MATERIALS & INTERFACES, 2019, 卷号: 11, 页码: 19066-19076
-
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2020/01/03
higher alcohols
synthesis gas
trimetallic Oxides (MMOs)
alkaline-etching process
alkalinity/acidity
KMoS/MMO catalyst
Morphology-controlled porous Bi0.9La0.1FeO3 microspheres for applications in supercapacitors
期刊论文
CERAMICS INTERNATIONAL, 2018, 卷号: 44, 页码: 2649-2655
作者:
Lin, Ying
;
Wang, Qian
;
Gao, Shuya
;
Yang, Haibo
;
Liu, Pan
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/11/26
Morphology
Porous BLFO microspheres
One-step etching process
Electrochemical capacitors
A strong saddle-shaped surface-to-volume ratio effect on the Young's modulus of silicon nanotubes
期刊论文
APPLIED PHYSICS LETTERS, 2018, 卷号: 112
作者:
Yue, Yonghai
;
Gong, Qihua
;
Li, Zhiqin
;
Duan, Huigao
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2019/12/30
Electron beam lithography
Nanotubes
Reactive ion etching
Silicon
Yarn
Device application
In-situ compression
Nano-scale objects
Nanofabrication process
One-dimensional nanomaterials
Silicon nanotubes
Single crystalline silicon
Surface-to-volume ratio
Elastic moduli
Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-step deep reactive ion etching process
期刊论文
MICRO & NANO LETTERS, 2017, 卷号: 12, 页码: 482-485
作者:
Wang, Wenqiang
;
Li, Chen
;
Xu, Wencai
;
Zou, Helin
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/02
microactuators
membranes
ink jet printing
sputter etching
silicon
elemental semiconductors
microactuator membranes
piezoelectric inkjet print head
multistep deep reactive ion etching process
multilayered structures
multilayered actuator membranes
silicon on insulator wafers
notching effect
Si
SiO2
Monitoring the Etching Process of Hi-Bi Fiber through a Fiber Loop Mirror
期刊论文
IEEE Photonics Journal, 2017, 卷号: Vol.9 No.6, 页码: 1-8
作者:
Hui Wang
;
Benli Yu
;
Danling Wu
;
Jun Zhu
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/04/22
Etching
process
Hi-Bi
fiber
birefringence
fiber
loop
mirror
The immunity of doping-less junctionless transistor variations including the line edge roughness
会议论文
Hong Kong, Hong kong, August 3, 2016 - August 5, 2016
作者:
Wan, Wenbo
;
Lou, Haijun
;
Xiao, Ying
;
Lin, Xinnan
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2020/11/15
Etching
Semiconductor doping
Transistors
Charge plasmas
Electrical characteristic
Etching process
Junctionless
Junctionless transistors
Line Edge Roughness
ON/OFF current ratio
variation
A Multi-Scale Study on Silicon-Oxide Etching Processes in C4F8/Ar Plasmas
期刊论文
PLASMA SCIENCE & TECHNOLOGY, 2016, 卷号: 18, 页码: 666-673
作者:
Sui Jiaxing
;
Zhang Saiqian
;
Liu Zeng
;
Yan Jun
;
Dai Zhongling
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/09
plasma etching
multi-scale model
trench profile
surface process
Integrated microoxygen sensor based on nanostructured TiO2 thin films
期刊论文
Micro & Nano Letters, 2015, 卷号: 10, 期号: [db:dc_citation_issue], 页码: 597-602
作者:
Wang, Hairong
;
Wang, Jiaxin
;
Chen, Lei
;
Yao, Yuqing
;
Sun, Quantao
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
electrodes
sol-gel process
nanostructured thin films
integrated microoxygen sensor
sensor chips
adiabatic cavity
etching
TiO2
sol-gel processing
interdigitated electrodes
response properties
O-2
MIS structures
microheater
wet etching
nanostructured materials
Si
semiconductor thin films
oxygen
nanosensors
titanium compounds
gas sensors
optimisation
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