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浏览/检索结果: 共2条，第1-2条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Ion beam sputter deposition of zirconia thin films (EI CONFERENCE) 会议论文 International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China Jin W.; Jin C.; Liu L.; Zhu H.; Yang H. 收藏  |  浏览/下载：14/0  |  提交时间：2013/03/25 We determined the optical constants (the refractive index n and the extinction coefficient k) of ion beam sputter deposited zirconia thin films with spectroscopic ellipsometry (SE). First  we obtained the structure information (the layer thickness  surface roughness and layer diffusion) by fitting the grazing x-ray reflection (GXRR) spectra. The fitted surface roughness is verified by atomic force micrometer (AFM) measurement. Second  based on the acquired structure information  the measured ellipsometry spectra are fitted in the range of 240-800nm at an incident angle of 70.25 degree. The optical constants are solved based on the Tauc-Lorentz dispersion. The optical band gap extracted by SE is 4.79eV. Finally  the optical band gap is verified by Taue plot method  which is well consistent with that of SE.   Optical characteristic of ion beam sputter deposited aluminum thin films (EI CONFERENCE) 会议论文 International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China Jin W.; Jin C.; Zhu H.; Liu L.; Yang H. 收藏  |  浏览/下载：20/0  |  提交时间：2013/03/25 Aluminum is a typical active metal very easy to oxidize. An oxide surface layer of about 2-6nm quickly formed in air which adds difficulty to the optical constants determination. An ex-situ method is used to determine the optical constants of aluminum thin films. First  Second  Third  alumina (Al2O3) thin film is deposited by ion beam sputter deposition. The optical constants and thickness are determined by spectral ellipsoemtry (SE). The thickness is verified by grazing x-ray reflection (GXRR) fitting method  Al thin film with an Al2O3 cap layer on top is deposited. This cap layer is of the same deposition condition with the first step. By fitting the GXRR spectra  based on the acquired structure information  the structure information (the thickness of the aluminum and the cap layer  the ellipsometric spectra are fitted. The optical constants of the aluminum layer are extracted with the aid of the Drude model. Finally  surface roughness and the diffusion between Al-Al2O 3) is obtained  an induced transmission filter (ITF) is designed and deposited.