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Technology on fabrication of precise SiC aspherical mirror (EI CONFERENCE) 会议论文
2011 International Conference on Materials and Products Manufacturing Technology, ICMPMT 2011, October 28, 2011 - October 30, 2011, Chengdu, China
Zhang Z.
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This paper represents a technique to produce the large size optical aspherical mirror by using reaction-bonded silicon carbide to meet the material requirements of the space used mirrors  based on the characters comparison of all types mirror material. Techniques are described in this paper  including the bonding procedure of silicon carbide to form a mirror shape  the CCOM technology for aspheric grinding  polishing on a home-developed tool -FSGJ-2  and the aspheric profilometry. A specialized Offner Null lens is also developed to measure the aspherical mirror with laser interferometer. With the technology depicted in the paper  a 502mm 298 mm off-axis SiC aspherical mirror is successfully made with a surface accuracy better than 1/50rms  the final result meets the design requirement. (2011) Trans Tech Publications.  


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