Technology on fabrication of precise SiC aspherical mirror (EI CONFERENCE)
Zhang Z.
2011
会议名称 2011 International Conference on Materials and Products Manufacturing Technology, ICMPMT 2011, October 28, 2011 - October 30, 2011
会议地点 Chengdu, China
关键词 This paper represents a technique to produce the large size optical aspherical mirror by using reaction-bonded silicon carbide to meet the material requirements of the space used mirrors
based on the characters comparison of all types mirror material. Techniques are described in this paper
including the bonding procedure of silicon carbide to form a mirror shape
the CCOM technology for aspheric grinding
polishing on a home-developed tool -FSGJ-2
and the aspheric profilometry. A specialized Offner Null lens is also developed to measure the aspherical mirror with laser interferometer. With the technology depicted in the paper
a 502mm 298 mm off-axis SiC aspherical mirror is successfully made with a surface accuracy better than 1/50rms
the final result meets the design requirement. (2011) Trans Tech Publications.
页码 396-401
收录类别 EI
内容类型 会议论文
源URL [http://ir.ciomp.ac.cn/handle/181722/33336 ]
专题 长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714
Zhang Z.. Technology on fabrication of precise SiC aspherical mirror (EI CONFERENCE)[C]. 见:2011 International Conference on Materials and Products Manufacturing Technology, ICMPMT 2011, October 28, 2011 - October 30, 2011. Chengdu, China.
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