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北京大学 [4]
西安交通大学 [4]
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半导体研究所 [4]
大连理工大学 [2]
山东大学 [2]
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期刊论文 [15]
会议论文 [5]
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微电子学 [3]
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Fabrication of 3D SiO structures using patterned PMMA sacrificial layer
期刊论文
Journal of Micromechanics and Microengineering, 2018, 卷号: Vol.28 No.2
作者:
Li, Z.
;
Xiang, Q.
;
Zheng, M.
;
Bi, K.
;
Chen, Y.
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2019/12/26
colorimetric refractive index sensor
electron-beam 3D fabrication
freestanding SiOx structures
hydrogen silsesquioxane
sacrificial layer
PERFORMANCE ENHANCEMENT OF BIMATERIAL CANTILEVER FOCAL PLANE ARRAY BY METAMATERIAL ABSORBER
其他
2015-01-01
Ma, W.
;
Wen, Y.
;
Yu, X.
;
Liu, X.
;
Zhao, Y.
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2017/12/03
Focal Plane Array (FPA)
Bimaterial cantilever
Metamaterial absorber (MMA)
Polyimide
Sacrificial layer process
MICROBOLOMETERS
DETECTORS
GaAs-on-insulator fabricated via ion-cut in epitaxial GaAs /Ge substrate
会议论文
2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014, Guilin, China, October 28, 2014 - October 31, 2014
作者:
Chang, Yongwei
;
Chen, Da
;
Di, Zengfeng
;
Zhang, Miao
;
Yu, Wenjie
收藏
  |  
浏览/下载:0/0
  |  
提交时间:2017/01/20
Semiconducting gallium
Bonding
Chemical bonds
Etching
Gallium arsenide
Germanium
Molecular beam epitaxy
Silicon oxides
Silicon wafers
Wafer bonding
Annealing temperatures
Bulk substrates
Chemical etching
Dose implantation
Epitaxial GaAs
High-crystalline quality
Room temperature bonding
Sacrificial layer
Fabrication of a three-layer SU-8 mould with inverted T-shaped cavities based on a sacrificial photoresist layer technique
期刊论文
BIOMEDICAL MICRODEVICES, 2014, 卷号: 16, 期号: [db:dc_citation_issue], 页码: 655-660
作者:
Liu, Junshan
;
Zhang, Dong
;
Sha, Baoyong
;
Yin, Penghe
;
Xu, Zheng
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/03
Cast moulding
PDMS
Sacrificial layer
SU-8 mould
Fabrication of a three-layer SU-8 mould with inverted T-shaped cavities based on a sacrificial photoresist layer technique
期刊论文
BIOMEDICAL MICRODEVICES, 2014, 卷号: 16, 页码: 655-660
作者:
Liu, Junshan
;
Zhang, Dong
;
Sha, Baoyong
;
Yin, Penghe
;
Xu, Zheng
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/09
SU-8 mould
PDMS
Cast moulding
Sacrificial layer
Use of Amphoteric Copolymer Films as Sacrificial Layers for Constructing Free-Standing Layer-by-Layer Films
期刊论文
MATERIALS, 2013, 卷号: 6, 期号: 6, 页码: 2351-2359
作者:
Wang, Baozhen
;
Tokuda, Yu
;
Tomida, Koji
;
Takahashi, Shigehiro
;
Sato, Katsuhiko
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/23
layer-by-layer film
amphoteric copolymer
free-standing LbL film
sacrificial layer
poly(diallylamine-co-maleic acid)
Effect of laser fluence on sacrificial layer morphology in laser rear-side ablation of film
会议论文
作者:
Wang, Wenjun
;
Hu, Bing
;
Mei, Xuesong
;
Liu, Bin
;
Wang, Zibao
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/10
Laser fluences
Laser rear-side ablations
Micro-lens arrays
Polymer surfaces
Sacrificial layer
Fabrication of a thermoplastic multilayer microfluidic chip
期刊论文
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2012, 卷号: 212, 页码: 2315-2320
作者:
Li, Jingmin
;
Liu, Chong
;
Ke, Xue
;
Xu, Zheng
;
Li, Meng
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/13
Multilayer microfluidic chip
Embedded sacrificial layer
Laser edge welding
PMMA
Formation of polymer micro-bump with laser rear-side irradiation and sacrificial layer
会议论文
作者:
Shao, Jinyou
;
Miao, Linlin
;
Ding, Yucheng
;
Hu, Bing
;
Li, Xiangming
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/10
Micro-bumps
Polymer surfaces
Rear side
Sacrificial layer
Transparent substrate
Novel multicontact radio frequency microelectromechanical system switch in high-power-handling applications
期刊论文
journal of micro nanolithography mems and moems, 2011
Liu, Bo
;
Lv, Zhiqiu
;
He, Xunjun
;
Hao, Yilong
;
Li, Zhihong
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/13
radio frequency microelectromechanical system switches
ohmic contacts
microsprings
power-handling ability
metallic sacrificial layers
surface micromachining
RF-MEMS SWITCH
SACRIFICIAL LAYER
MICROSWITCHES
TRANSPORT
CONTACTS
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