Novel multicontact radio frequency microelectromechanical system switch   in high-power-handling applications

doi:10.1117/1.3564864

CORC > 北京大学 > 信息科学技术学院

	Novel multicontact radio frequency microelectromechanical system switch in high-power-handling applications
	Liu, Bo ; Lv, Zhiqiu ; He, Xunjun ; Hao, Yilong ; Li, Zhihong
刊名	journal of micro nanolithography mems and moems
	2011
关键词	radio frequency microelectromechanical system switches ohmic contacts microsprings power-handling ability metallic sacrificial layers surface micromachining RF-MEMS SWITCH SACRIFICIAL LAYER MICROSWITCHES TRANSPORT CONTACTS
DOI	10.1117/1.3564864
英文摘要	We report a novel multicontact radio frequency (RF) microelectromechanical system (MEMS) switch with mechanical independent switch elements and microspring contacts. The consistent contact arrangement and the robust contact design can effectively increase the contact area, reduce the current density, and therefore improve the power-/current-handling capability. The working mechanism of the switch with microspring contact is investigated by CoventorWare (R) simulation tools. The switch, fabricated by the Cu-Ni dual-metallic-sacrificial-layer surface micromachining, is actuated at 55 V for characterization. The closing time is 11 mu s, and the opening time is 13.5 mu s. The isolation is -30.9 dB at 2 GHz and -11.5 dB at 20 GHz; the insertion loss is -0.12 dB at 2 GHz and -0.22 dB at 20 GHz. The contact metal is Pt-Au, and the measured switch resistance drops from 48 to 1.2 Omega when the actuation voltage increases from 40 to 65 V. The switch element handles a current of 300 mA at 0.1 Hz. The switch is an excellent candidate for microwave applications requiring high-power handling. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3564864]; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000288944900007&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Optics; SCI(E); EI; 1; ARTICLE; 1; 10
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/291926]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Liu, Bo,Lv, Zhiqiu,He, Xunjun,et al. Novel multicontact radio frequency microelectromechanical system switch in high-power-handling applications[J]. journal of micro nanolithography mems and moems,2011.
APA	Liu, Bo,Lv, Zhiqiu,He, Xunjun,Hao, Yilong,&Li, Zhihong.(2011).Novel multicontact radio frequency microelectromechanical system switch in high-power-handling applications.journal of micro nanolithography mems and moems.
MLA	Liu, Bo,et al."Novel multicontact radio frequency microelectromechanical system switch in high-power-handling applications".journal of micro nanolithography mems and moems (2011).