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Surface Roughening of Pt-Polystyrene Spherical Janus Micromotors for Enhanced Motion Speed
期刊论文
MICROMACHINES, 2022, 卷号: 13
作者:
Zhou, Le
;
Wei, Yi
;
Zhang, Hongwen
;
Huang, Zhulin
;
Zhu, Shuyi
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2022/05/16
Pt-PS micromotors
plasma etching
surface roughening
Pt-pushed motion
speed enhancement
Morphological and structural damage investigation of nanostructured molybdenum fuzzy surface after pulsed plasma bombardment
期刊论文
CHINESE PHYSICS B, 2022, 卷号: 31
作者:
Luo, Yu-Chuan
;
Yan, Rong
;
Pu, Guo
;
Wang, Hong-Bin
;
Wang, Zhi-Jun
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2022/05/05
molybdenum nanostructured fuzz
pulsed-H plasma
edge localized mode
etching process
Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes
会议论文
作者:
Zhang, Jingwen
;
Li, Zhiwei
;
Shao, Junming
;
Liu, Dun
;
Fan, Bin
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2020/12/18
Electrodes
Electron temperature
EtchingElectron number densities
Etching depth
Etching uniformity
Irregular sample
Irregular shape
Large aperture
Plasma characteristics
Plasma discharge
Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes
期刊论文
Optics Express, 2020, 卷号: 28, 期号: 22, 页码: 33739-33746
作者:
Zhang, Jingwen
;
Li, Zhiwei
;
Shao, Junming
;
Liu, Dun
;
Fan, Bin
收藏
  |  
浏览/下载:21/0
  |  
提交时间:2020/12/18
Electrodes
Electron temperature
EtchingElectron number densities
Etching depth
Etching uniformity
Irregular sample
Irregular shape
Large aperture
Plasma characteristics
Plasma discharge
Improvement of GaN plasma etching uniformity by optimizing the coil electrode with plasma simulation and experimental validation
期刊论文
SURFACE & COATINGS TECHNOLOGY, 2020, 卷号: 400
作者:
Xiao, Dezhi
;
Ruan, Qingdong
;
Liu, Liangliang
;
Shen, Jie
;
Cheng, Cheng
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2020/11/26
GaN
Plasma etching
Inductively-coupled plasma
Field coupling
Uniformity
Plasma simulation
Simulation of Discharge Characteristics for the Plasma Etching of Large Area SiO2 Substrates
期刊论文
JOURNAL OF RUSSIAN LASER RESEARCH, 2020, 卷号: 41, 期号: 3, 页码: 258-267
作者:
Zhang JW(张景文)
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2020/11/30
reactive ion etching
capacitive coupled discharge
fluid simulation
discharge parameter
large area SiO2 substrates
plasma radial uniformity
Simulation of Discharge Characteristics for the Plasma Etching of Large Area SiO2 Substrates
期刊论文
JOURNAL OF RUSSIAN LASER RESEARCH, 2020, 卷号: 41, 期号: 3, 页码: 258-267
作者:
Zhang, Jingwen
;
Fan, Bin
;
Li, Zhiwei
;
Gao, Guohan
;
Li, Bincheng
收藏
  |  
浏览/下载:30/0
  |  
提交时间:2021/05/11
Reactive Ion Etching
Capacitive Coupled Discharge
Fluid Simulation
Discharge Parameter
Large Area Sio2 Substrates
Plasma Radial Uniformity
Facile Synthesis of LaCoO3 with a High Oxygen Vacancy Concentration by the Plasma Etching Technique for High-Performance Oxygen Ion Intercalation Pseudocapacitors
期刊论文
ACS APPLIED ENERGY MATERIALS, 2020, 卷号: 3, 期号: 1, 页码: 300-308
作者:
Guo, Guanlun
;
Ouyang, Kang
;
Yu, Jipan
;
Liu, Yihui
;
Feng, Shuanglong
收藏
  |  
浏览/下载:38/0
  |  
提交时间:2020/08/24
LaCoO3 nanoparticles
plasma etching technique
oxygen vacancy
pseudocapacitors
anion-intercalation energy storage mechanism
Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investigation of the ionization rate
期刊论文
AIP ADVANCES, 2019, 卷号: 9
作者:
Wen, Ying-Ying
;
Zhang, Yu-Ru
;
Jiang, Ge
;
Song, Yuan-Hong
;
Wang, You-Nian
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2019/12/02
Aspect ratio
Electric discharges
Energy dissipation
Etching
Ionization
Secondary emission, Capacitively coupled discharges
Discharge parameters
High-aspect-ratio-etching
Ionization rates
Plasma generation
Pressure increase
Secondary electrons
Voltage increase, Electrons
Comparative study of surface modification of polyethylene by parallel-field and cross-field atmospheric pressure plasma jets
期刊论文
JOURNAL OF APPLIED PHYSICS, 2019, 卷号: 125
作者:
Liu, Xin
;
Wang, Chuanchuan
;
Liu, Jiyu
;
Wang, Guansong
;
Yang, Zhikang
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2019/12/02
Atmospheric movements
Atmospheric pressure
Flow of gases
Plasma etching
Polyethylenes, Atmospheric pressure plasma jets
Comparative studies
Comprehensive effect
Hydrophilic groups
Polyethylene sheet
Surface modification of polymers
Surface wettability
Treatment conditions, Plasma jets
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