CORC

浏览/检索结果: 共4条,第1-4条 帮助

已选(0)清除 条数/页:   排序方式:
Experimental study on the extension of nodal aberration theory to pupil-offset off-axis three-mirror anastigmatic telescopes 期刊论文
Journal of Astronomical Telescopes Instruments and Systems, 2019, 卷号: 5, 期号: 2, 页码: 12
作者:  G.H.Ju;  H.C.Ma;  Z.Y.Gu;  C.X.Yan
收藏  |  浏览/下载:0/0  |  提交时间:2020/08/24
Computation of misalignment and primary mirror astigmatism figure error of two-mirror telescopes 期刊论文
Journal of Astronomical Telescopes Instruments and Systems, 2018, 卷号: 4, 期号: 1, 页码: 10
作者:  Gu, Z. Y.;  Wang, Y.;  Ju, G. H.;  Yan, C. X.
收藏  |  浏览/下载:6/0  |  提交时间:2019/09/17
Design and tolerance analysis of compensator for high order aspheric surface testing (EI CONFERENCE) 会议论文
2009 International Conference on Optical Instruments and Technology - Optoelectronic Measurement Technology and Systems, October 19, 2009 - October 22, 2009, Shanghai, China
Chen X.; Liu W.; Kang Y.; Wei Z.
收藏  |  浏览/下载:19/0  |  提交时间:2013/03/25
High accuracy is required in surface testing of 90nm nodal point lithography projecting lens. By comparing various aspheric surface testing methods  the structure layout of the compensator is a meniscus positive lens combined with a Plano-convex positive lens. The design results indicate that: primary and high order aberrations are balanced well  we adopt Offner null compensator to test the aspheric surface in the point diffraction interferometer at last. In this paper  MTF exceeds diffraction limit  an Offner compensator is presented on the base of the third order aberration theory to test concave aspheric surface  root-mean-square (RMS) of wave front error /167. The F-number of the system can achieve F/1.64. By the analysis of the process of aspheric surface testing with the designed system  the optical construction parameters of which is determined by introducing equal-quantities spherical aberration to compensate all orders of aspheric coefficients. The field of view of the system is 0.02  a loosen distribution of the tolerance was presented based on the accuracy of measuring apparatus. 2009 SPIE.  
Nodal Aberration Theory for wild-filed asymmetric optical systems (CPCI-S收录) 会议
作者:  Chen, Yang[1];  Cheng, Xuemin[1];  Hao, Qun[2]
收藏  |  浏览/下载:2/0  |  提交时间:2019/04/11


©版权所有 ©2017 CSpace - Powered by CSpace