CORC

浏览/检索结果: 共6条,第1-6条 帮助

已选(0)清除 条数/页:   排序方式:
Hysteresis modelling and feedforward compensation of piezoelectric nanopositioning stage with a modified Bouc-Wen model 期刊论文
MICRO & NANO LETTERS, 2018, 卷号: 13, 期号: 8
作者:  Ming, Min;  Feng, Zhao;  Ling, Jie;  Xiao, Xiao-Hui
收藏  |  浏览/下载:54/0  |  提交时间:2019/12/05
Feed-forward pressure control of common rail system based on parameters self-tuning fuzzy PID algorithm 期刊论文
2010, 2010
Song Guomin; Huang Maoyang; Ji Xiaohua; Lu Zhaozhen
收藏  |  浏览/下载:3/0
Research on the stability of MPPT strategy applied in single-stage grid-connected photovoltaic system 期刊论文
2010, 2010
Wu Li-bo; Zhao Zheng-ming; Liu Jian-zheng; Wamg Jian; Liu Shu
收藏  |  浏览/下载:3/0
CCD-based on-line thickness measurement system for calender 会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, Optical Design and Testing III, Beijing, China, INSPEC
Guo Lifeng; Fan Yuming; Zhang Guoxiong; Chen Ken
收藏  |  浏览/下载:5/0
Superconducting magnetic energy storage based parallel processing uninterruptible power supply system and its control strategy 期刊论文
2010, 2010
Hou Yong; Jiang Xiao-hua; Jiang Jian-guo
收藏  |  浏览/下载:3/0
Key techniques of laser direct writing of fine lines on the spherical surface (EI CONFERENCE) 会议论文
ICO20: Optical Design and Fabrication, August 21, 2005 - August 26, 2005, Changchun, China
Liang F.; Hu J.
收藏  |  浏览/下载:16/0  |  提交时间:2013/03/25
The main principles of laser direct writing (LDW) system for lines on the spherical surface (SS) are discussed. It is pointed out that line profile is determined by the exposure dose distribution  which lies on the light intensity distribution of focus plane and the scanning speed. To improve the quality of line profile on the SS  several key techniques as follows are introduced. Firstly  the unique system configuration  four axes mutually intersecting at the center of the SS  is adopted  which ensures the shape of the focus be maintained circular during the writing period. Secondly  an automatic focus system (AFS) with the function of automatic focus in a certain range is introduced. Thirdly  to guarantee the linear velocity to accord with the exposure character of the photoresist all the time  an efficient arithmetic that controls motors run at appropriate angular velocity in different latitude is developed. Finally  to achieve a stable and well-behaved system so as to compensate the velocity instability resulting from unavoidable errors of mechanical and electronics factor  a powerful programmable multi-axis controller (PMAC) is utilized as the kernel element of the servocontrol system  and the curves of step response and parabolic response achieved by feedforward and PID loop tuning indicate that the location precision and velocity stability have reached a high level. The experimental results of LDW of lines on the SS work piece with a diameter 30 mm and a radius equal to 100 mm are given. The section analysis of the lines on the photoresist by the atomic force microscope (AFM) after exposure and development is performed. The results show that line width is about 3.0 m  and the steep sides of the lines are parallel to each other.  


©版权所有 ©2017 CSpace - Powered by CSpace