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清华大学 [4]
长春光学精密机械与物... [1]
武汉大学 [1]
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期刊论文 [4]
会议论文 [2]
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2018 [1]
2010 [4]
2006 [1]
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Hysteresis modelling and feedforward compensation of piezoelectric nanopositioning stage with a modified Bouc-Wen model
期刊论文
MICRO & NANO LETTERS, 2018, 卷号: 13, 期号: 8
作者:
Ming, Min
;
Feng, Zhao
;
Ling, Jie
;
Xiao, Xiao-Hui
收藏
  |  
浏览/下载:54/0
  |  
提交时间:2019/12/05
control nonlinearities
particle swarm optimisation
feedforward
position control
compensation
hysteresis
vibration control
nanopositioning
piezoelectric actuators
(MBW) model
polynomial function
PEA
particle swarm optimisation algorithm
MBW model
input-output
corresponding identification parameters
experimental data
0
31% relative error
feedforward compensator
positioning accuracy
feedforward compensation
piezoelectric nanopositioning stage
modified Bouc
piezoelectric actuators
nanopositioning equipment
strong hysteresis nonlinearity
Feed-forward pressure control of common rail system based on parameters self-tuning fuzzy PID algorithm
期刊论文
2010, 2010
Song Guomin
;
Huang Maoyang
;
Ji Xiaohua
;
Lu Zhaozhen
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  |  
浏览/下载:3/0
Research on the stability of MPPT strategy applied in single-stage grid-connected photovoltaic system
期刊论文
2010, 2010
Wu Li-bo
;
Zhao Zheng-ming
;
Liu Jian-zheng
;
Wamg Jian
;
Liu Shu
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  |  
浏览/下载:3/0
CCD-based on-line thickness measurement system for calender
会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, Optical Design and Testing III, Beijing, China, INSPEC
Guo Lifeng
;
Fan Yuming
;
Zhang Guoxiong
;
Chen Ken
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  |  
浏览/下载:5/0
Superconducting magnetic energy storage based parallel processing uninterruptible power supply system and its control strategy
期刊论文
2010, 2010
Hou Yong
;
Jiang Xiao-hua
;
Jiang Jian-guo
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  |  
浏览/下载:3/0
Key techniques of laser direct writing of fine lines on the spherical surface (EI CONFERENCE)
会议论文
ICO20: Optical Design and Fabrication, August 21, 2005 - August 26, 2005, Changchun, China
Liang F.
;
Hu J.
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浏览/下载:16/0
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提交时间:2013/03/25
The main principles of laser direct writing (LDW) system for lines on the spherical surface (SS) are discussed. It is pointed out that line profile is determined by the exposure dose distribution
which lies on the light intensity distribution of focus plane and the scanning speed. To improve the quality of line profile on the SS
several key techniques as follows are introduced. Firstly
the unique system configuration
four axes mutually intersecting at the center of the SS
is adopted
which ensures the shape of the focus be maintained circular during the writing period. Secondly
an automatic focus system (AFS) with the function of automatic focus in a certain range is introduced. Thirdly
to guarantee the linear velocity to accord with the exposure character of the photoresist all the time
an efficient arithmetic that controls motors run at appropriate angular velocity in different latitude is developed. Finally
to achieve a stable and well-behaved system so as to compensate the velocity instability resulting from unavoidable errors of mechanical and electronics factor
a powerful programmable multi-axis controller (PMAC) is utilized as the kernel element of the servocontrol system
and the curves of step response and parabolic response achieved by feedforward and PID loop tuning indicate that the location precision and velocity stability have reached a high level. The experimental results of LDW of lines on the SS work piece with a diameter 30 mm and a radius equal to 100 mm are given. The section analysis of the lines on the photoresist by the atomic force microscope (AFM) after exposure and development is performed. The results show that line width is about 3.0 m
and the steep sides of the lines are parallel to each other.
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